2021
DOI: 10.1021/acsomega.1c01421
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Photonic Curing of Solution-Processed Oxide Semiconductors with Efficient Gate Absorbers and Minimal Substrate Heating for High-Performance Thin-Film Transistors

Abstract: In this study, photonic curing is used to rapidly and effectively convert metal-oxide sol−gels to realize high-quality thin-film transistors (TFTs). Photonic curing offers advantages over conventional thermal processing methods such as ultrashort processing time and compatibility with low-temperature substrates. However, previous work on photonically cured TFTs often results in significant heating of the entire substrate rather than just the thin film at the surface. Here, sol−gel indium zinc oxide (IZO)-based… Show more

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Cited by 16 publications
(13 citation statements)
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“…The resulting high-speed particle stream remained focused over a distance of 2 mm from the nozzle to the substrate without compromising the resolution. Once the chip was fabricated, photonic curing was used to rapidly and efficiently convert the graphene ink solution into high-quality thin-film electrodes . Samples were passed through a Novacentrix Pulseforge 3300 machine to expose graphene to the incident energy.…”
Section: Methodsmentioning
confidence: 99%
“…The resulting high-speed particle stream remained focused over a distance of 2 mm from the nozzle to the substrate without compromising the resolution. Once the chip was fabricated, photonic curing was used to rapidly and efficiently convert the graphene ink solution into high-quality thin-film electrodes . Samples were passed through a Novacentrix Pulseforge 3300 machine to expose graphene to the incident energy.…”
Section: Methodsmentioning
confidence: 99%
“…Therefore, in our present work, we intended to use indium-free pure ZnO as the semiconductor in order to reduce the cost of the device and demonstrate the mechanical flexibility and optical transparency of the device. In addition, unlike most of the previous works in which only the semiconducting layers were photonic cured, in our work, the ZrO 2 -based gate insulating layer was also obtained by photonic curing. , This not only reduced the operating voltage and improved the device performance but also enabled us to fabricate the devices on a flexible substrate at a significantly lower cost and save important processing time. Therefore, it can be stated that for devices such as TFTs in which multiple layers are used and all the layers can be made of MOs, this work can be treated as a stepping stone toward realizing all photonic cured, low-voltage, high-performance, flexible, and transparent TFTs opening the door for commercial production of next-generation flexible and transparent electronics.…”
Section: Introductionmentioning
confidence: 92%
“…Once the chip was fabricated, photonic curing was used to rapidly and efficiently convert the graphene ink solution into high-quality thin-film electrodes. 26 Samples were passed through a Novacentrix Pulseforge 3300 machine to expose graphene to the incident energy. The PulseForge 3300 tool is capable of delivering peak power up to 100 kW/cm 2 in pulses as short as 30 ms.…”
Section: Rgb Value Analysismentioning
confidence: 99%