2004
DOI: 10.1109/lpt.2004.835193
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Photopolymer-Based Diffractive and MMI Waveguide Couplers

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Cited by 12 publications
(8 citation statements)
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“…Using SEIM, the optical waveguide based designed conventional DC and conventional MMI coupler are fabricated with the help of available standard Silicon Oxynitride (SiON) technology [1][2][3][4][5][6][7] by means of standard Photolithography [1] and Reactive Ion Etching (RIE) [1] technique. At the outset, using PECVD method [1] a layer of Silicon dioxide (SiO 2 ) for lower cladding of 3 μm thickness and then SiON core layer of thickness ~2.0 μm has been deposited on a RCA cleaned <100> silicon wafer.…”
Section: Silicon Substratementioning
confidence: 99%
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“…Using SEIM, the optical waveguide based designed conventional DC and conventional MMI coupler are fabricated with the help of available standard Silicon Oxynitride (SiON) technology [1][2][3][4][5][6][7] by means of standard Photolithography [1] and Reactive Ion Etching (RIE) [1] technique. At the outset, using PECVD method [1] a layer of Silicon dioxide (SiO 2 ) for lower cladding of 3 μm thickness and then SiON core layer of thickness ~2.0 μm has been deposited on a RCA cleaned <100> silicon wafer.…”
Section: Silicon Substratementioning
confidence: 99%
“…Extensive studies have been made for the fabrication and implementation of such integrated optic (IO) devices using a variety of materials such as Lithium Niobate [1]- [2], polymers [1] [3], III-V semiconductors [4]- [5] and silicon based materials [1]- [6]. Out of these materials Silicon based materials have the potential to allow strong confinement of light with moderately low propagation losses, high index contrast, low material cost and its compatibility with well known conventional silicon based IC technology.…”
Section: Introductionmentioning
confidence: 99%
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“…Holographic materials and corresponding gratings with spacings in the micro- to sub-micrometer range are used as standard light diffractive optical elements [1,2], and they are also the subject of research concerning, e.g., holographic data storage [3] and waveguide couplers [4]. A variety of photosensitive materials has already been considered as the foundation for gratings applicable to light optics.…”
Section: Introductionmentioning
confidence: 99%