“…Depth profiles, on a semilogarithmic scale, of6 Li, 181 Ta,16 O and 166 Er SIMS signals detected from six LT sample plates coated with 12, 20, 16, 12, 30 and 12 ± 2 nm Er films and annealed under different conditions of (a) 1000/50, (b) 1130/40, (c) 1300/25, (d) 1400/17, (e) 1450/17 and (f) 1500/10 • C/h. The green plot overlapped on each measured Er 3+ profile (red balls) represents the erfc or Gaussian fit (For interpretation of the references to colour in this figure legend, the reader is referred to the web version of this article.…”