Er 3 + diffusion in congruent LiNbO 3 crystal doped with 4.5 mol% MgOJudd-Ofelt analysis of spectroscopic property of Er 3 + in congruent and near-stoichiometric Zn ∕ Er -codoped Li Nb O 3 crystalsThe thermal diffusion of Er 3+ into X-and Z-cut congruent LiNbO 3 crystal in Li-enriched atmosphere ͓i.e., vapor transport equilibration ͑VTE͔͒, created by Li 3 NbO 4 -LiNbO 3 two-phase powder at the temperature around 1130°C, was attempted. Single-crystal x-ray diffraction, micro-Raman, photoluminescence spectroscopy, and secondary ion mass spectrometry ͑SIMS͒ were used to study the crystalline phase with respect to Er 3+ ion and the Er 3+ diffusivity. The results show that the thickness of the Er film coated should not be thicker than 10 nm for an X-cut plate and 15 nm for a Z-cut plate. In this case, the diffusion is complete if the duration is long enough ͑Ͼ150 h͒ and the Er 3+ ions in the diffused layer still retain the LiNbO 3 phase. On the other hand, if the initial thickness of the Er metal film is thicker than 10 nm for the X-cut plate and 15 nm for the Z-cut plate, the diffusion will be incomplete no matter how long the duration is. This is because the residual Er 3+ ions form irremovable ErNbO 4 grains on the surface of the crystal. SIMS analysis on an X-cut VTE ͑1130°C / 192 h͒ and a Z-cut VTE ͑1129°C / 158 h͒ crystal coated, respectively, with 10 and 15 nm thick Er film reveals that the Er diffusion shows obvious anisotropy with the mean diffusion coefficients of 0.0155 and 0.0957 m 2 / h, respectively. The surface concentrations are 1.5ϫ 10 20 and 1.0ϫ 10 20 at./ cm 3 , respectively. The diffused Er 3+ ions follow the stretched-exponential decay profile with a stretching factor of 1.85 and 3.5, respectively. The Li/ Nb ratio in the Er-diffused layer is similar to 99.4% for the X-cut sample coated with 10 nm thick Er film and 99.3% for the Z-cut crystal coated with 15 nm thick Er film. The rms roughness of the diffused surface is better than 6 and 4 nm for the X-cut and Z-cut samples, respectively.