Photosensitive polyimides developable with basic aqueous solutions (II)

Takano, Kei; Mikogami, Yukihiro; Nakano, Yoshikatsu; Hayase, Rumiko; Hayase, Shuzi

doi:10.1002/app.1992.070460702

Cited by 15 publications

(6 citation statements)

References 8 publications

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“…Tetramethylammonium hydroxide (TMAH) is used widely in the manufacture of semiconductors and liquid crystal displays (LCDs; Takano et al, 1992). Its use is increasing and amounts to more than 500 tons per year in these industries.…”

Section: Introductionmentioning

confidence: 99%

Toxicity of tetramethylammonium hydroxide: Review of two fatal cases of dermal exposure and development of an animal model

et al. 2011

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To document two cases of patients who were fatally exposed to tetramethylammonium hydroxide (TMAH) on the skin and to establish a rat model to investigate the effects of dermal exposure to TMAH. The charts of two workers who died from occupational accidental exposure to TMAH were reviewed. The 4-hour lethal dose (LD₅₀) of TMAH was determined by applying solutions mimicking the two most common industrially used concentrations (2.38% and 25%) of TMAH to the skin of Sprague-Dawley rats. Exposure of the rat's skin to 2.38% or 25% TMAH generated LD₅₀ values of 85.9 mg/kg and 28.7 mg/kg, respectively. Application of either concentration of TMAH to the skin produced a rapid, significant increase in the rate of respiration. The serum concentrations of tetramethylammonium (TMA) also changed significantly with time of exposure to both concentrations of TMAH. The level of blood urea nitrogen decreased significantly in rats exposed to the 2.38% TMAH, and rats exposed to the 25% solution had a significant decrease in the serum concentration of sodium. Injection of atropine after 5 minutes of exposure did not significantly overcome any of the toxic effects observed with either solution of TMAH. The preliminary results in the rat model indicated that the lethality of TMAH cannot be fully explained by the severity of the patients' chemical burns, and the physiologic effects on respiratory and kidney functions were probably involved.

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Section: Introductionmentioning

confidence: 99%

Toxicity of tetramethylammonium hydroxide: Review of two fatal cases of dermal exposure and development of an animal model

et al. 2011

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“…The Langmuir-Blodgett (LB) technique is anexcellent method for preparing ultrathin films with a well-defined molecular order.-Suitable LB films can be formed either from amphiphilic polymersMIm or from polymers with rigid chains.%+% The authors have already synthesized amphiphilic polysilanes with hydroxyphenyl groups and have revealed that these polymers provide monolayers at the air-water interface. 31 considered to be necessary to endow the polymers with rigidity, leading to oriented films in a plane.%…”

Section: Introductionmentioning

confidence: 99%

Preparation of Oriented Langmuir-Blodgett Films of Polysilanes Bearing Hydroxyalkyl or Alkoxyalkyl Groups

Kani¹,

Nakano²,

Majima³

et al. 1994

Macromolecules

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Polysilane polymers bearing hydroxyalkyl or alkoxyalkyl groups form monolayers (L films) at an air-water interface. It is possible to transfer all of the L films to hydrophobic substituents to provide Langmuir-Blodgett films. Among these polymers, polpilanes having more than three alkyl carbons have provided oriented polpilane thin f i in which the silicon main chains align with each other in the direction parallel to the dipping direction of the substrates. The orientations were evaluated by their polarized W absorptions. The dichroic ratios increase when Ca2+ ions were added to the water. Polysilane films with alkoxyalkyl groups show abrupt thermochromic transitions, while polysilanes with hydroxyalkyl groups show no thermochromism.

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“…However, the use of positive‐working PSPIs rather than negative‐working PSPIs is preferred in lithography because of many advantages such as lower sensitivity to dust particles, better suited shapes for the pattern profiles in multilayer systems, developability with alkaline aqueous solutions, and reduced impact on the environment 2, 3. There are many reports on the alkaline‐developable positive‐working PSPI, which are mainly prepared from polyimide precursor and dissolution inhibitor such as diazonaphtoquinone (DNQ) 6, 7. Reaction developable PSPI based on soluble polyimide and DNQ,8, 9 and the direct attachment of DNQ to the PI precursors10, 11 have also been reported.…”

Section: Introductionmentioning

confidence: 99%

A positive‐working photosensitive polyimide based on thermal cross‐linking and acidolytic cleavage

Jung

Hyeon-Lee

Choi

2007

J of Applied Polymer Sci

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A novel positive-working photosensitive polyimide (PSPI) based on a poly(hydroxyimide) (PHI), a crosslinking agent having vinyl ether groups, and a photoacid generator (PAG) was prepared. The PHI as a base resin of the three-component PSPI was synthesized from 4,4 0 -oxydiphthalic anhydride and 2,2 0 -bis(3-amino-4-hydroxyphenyl)hexafluoropropane through ring-opening polymerization and subsequent thermal cyclization. 2,2 0 -bis(4-(2-(vinyloxy)ethoxy)phenyl)propane (BPA-DEVE) was used as a vinylether compound and diphenyliodonium 5-hydroxynaphthalene-1-sulfonate was used as a PAG. The phenolic hydroxyl groups of the PHI and the vinyl ether groups of BPA-DEVE are thermally crosslinked with acetal structures during prebake step, and the crosslinked PHI becomes completely insoluble in an aqueous basic solution. Upon exposure to UV light (365 nm) and subsequent postexposure bake (PEB), a strong acid generated from the PAG cleaves the crosslinked structures, and the exposed area is effectively solubilized in the alkaline developer. The dissolution behavior of the PSPI containing each 11.5 wt % of BPA-DEVE and of the PAG was studied after UV exposure (365 nm) and PEB. It was found that the difference in dissolution rates between exposed and unexposed areas was enough to get high resolution. A fine positive pattern with a resolution of 5 lm in a 3.7-lm-thick film was obtained from the three-component PSPI.

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Photosensitive polyimides developable with basic aqueous solutions (II)

Cited by 15 publications

References 8 publications

Toxicity of tetramethylammonium hydroxide: Review of two fatal cases of dermal exposure and development of an animal model

Toxicity of tetramethylammonium hydroxide: Review of two fatal cases of dermal exposure and development of an animal model

Preparation of Oriented Langmuir-Blodgett Films of Polysilanes Bearing Hydroxyalkyl or Alkoxyalkyl Groups

A positive‐working photosensitive polyimide based on thermal cross‐linking and acidolytic cleavage

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