photosensitivity,The understanding and manipulation of the point defect structure in oxide glasses have been critical to the enhanced performance and reliability of optical-fiber-based, photosensitive photonic devices that currently fmd widespread application in telecommunications and remote sensing technologies. We provide a brief review of past research investigating photosensitive mechanisms in germanosilicate glasses, the primary material system used in telecommunications fibers. This discussion motivates an overview of ongoing work within our laboratories to migrate photosensitive glass technologies to a planar format for integrated photonic applications. Using reactive-atmosphere, RFmagnetron sputtering, we have demonstrated control of glass defect structure during synthesis, thereby controlling both the material photosensitivity (i. e. dispersion and magnitude of the refractive index change) and its environmental stability.