Physical and mechanical properties of chromium zirconium nitride thin films

Aouadi, Samir; Maeruf, T.; Twesten, R. D.; Mihut, Dorina M.; Rohde, S. L.

doi:10.1016/j.surfcoat.2005.02.169

Cited by 44 publications

(57 citation statements)

References 24 publications

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“…24 Thus, with an increase in the Zr content, the grain size decreased and the film thickness increased due to the continuous re-nucleation and the formation of a nanocomposite structure which favours grain refinement during the growth process. Similar grain size variation with different Zr and Cr contents was observed in Cr-Zr-N films by Aouadi et al 22 According to the Mahieu SMZ, 23 this structure is between zone I-a and zone I-b. As the Zr content increases to 39 at.-%, a mixture of round and faceted grains are found on the surface without defects (Fig.…”

Section: Gassupporting

confidence: 82%

“…It is observed that the developed film structure belongs to the structure of zone II, in agreement with the structural model zones proposed by Mahieu et al 23 Similar morphology evolution has also been reported in the literature. 21,22 With an increasing Zr content from 7 to 31 at.-% Zr, the Cr-Zr-N films shows a smooth and columnar growth with a RMS roughness value ranging from 11.3 ± 0.1 to 15.1 ± 0.1 nm (Fig. 3b and c).…”

Section: Gasmentioning

confidence: 92%

“…21 Additionally, this coating displays a small grain size without micro-droplets or craters in the surface morphology as a result of the mutual interference of the intermediate CrN and Cr 2 N phases. 22 The CrN coating thickness was found to be about 1.26 μm. It is observed that the developed film structure belongs to the structure of zone II, in agreement with the structural model zones proposed by Mahieu et al 23 Similar morphology evolution has also been reported in the literature.…”

Section: Gasmentioning

confidence: 97%

“…20 This kind of Zr3d peaks shift as compared to what has been observed for stoichiometric ZrN 21 is due to the non-stoichiometry of Cr-Zr-N films due to the decrease in the nitrogen content. 22 At 7 at-% Zr, the Zr3d peaks did not give any information because of the lower Zr concentration in the film. It can be observed that for the Zr-N film, the Zr3d, and N1s peaks were found to be located at 179.3, 182.62 and 397.3 eV, respectively.…”

Section: Gasmentioning

confidence: 98%

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Characterisation of R.F. magnetron sputtered Cr-N, Cr-Zr-N and Zr-N coatings

Fellah

Aissani

Samad

et al. 2017

Transactions of the IMF

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. Binary Cr-N, Zr-N and Cr-Zr-N films were synthesised using a R.F. reactive magnetron sputtering technique by co-sputtering Cr and Zr. The crystalline structure, morphology, mechanical and tribological properties of the films as a function of Zr content were characterised by X-ray diffraction, microanalysis X (WDS, EDS), X-ray photoelectron spectroscopy, scanning electron microscopy, atomic force microscopy, nanoindentation, scratch adhesion and pin-on-disc sliding wear tests. The residual stress was calculated with the Stoney formula. The Cr-Zr-N films exhibit a two-phase microstructure, containing a cubic (CrN, ZrN) with hexagonal (Cr 2 N, Zr 2 N) phases, as shown by X-ray diffraction. As the Zr content increased, a columnar and compact structure is developed with a low surface roughness. The results reveal that the mechanical and tribological properties of the films were found to depend on the Zr content and the hardness (maximum 26.3 GPa) is greatly improved in comparison with CrN and ZrN films, especially at 31 at.-% Zr. In the scratch test, the hardest film (Cr 0.18 Zr 0.31 N 0.47 ) exhibited an adhesive failure at Lc 2 = 34.3 N.

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Section: Gassupporting

confidence: 82%

Section: Gasmentioning

confidence: 92%

Section: Gasmentioning

confidence: 97%

Section: Gasmentioning

confidence: 98%

See 2 more Smart Citations

Characterisation of R.F. magnetron sputtered Cr-N, Cr-Zr-N and Zr-N coatings

Fellah

Aissani

Samad

et al. 2017

Transactions of the IMF

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“…1,2) Adding one more metal element to form Cr-based ternary nitride films has been reported to show improved properties compared to the binary CrN compound. [3][4][5] However, in the case of Zn, as an example added tertiary metal element, there is an apparent lack of important information about the properties of the ternary Cr-Zr-N films derived from various growth parameters, despite the fact that these are the key variables for engineering the desired properties of the material. In this work, we explored the role of the nitrogen partial pressure during film formation, and that of the post-process annealing temperature, on the structural, mechanical and electrical properties of the resultant Cr-Zr-N film.…”

Section: Introductionmentioning

confidence: 99%

Growth and Structural Characterizations of Nanostructured Chromium-Zirconium-Nitride Thin Films for Tribological Applications

Homhuan

Chaiyakun²,

Thonggoom

et al. 2010

Mater. Trans.

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Nanostructured Cr-Zr-N thin films were grown on Si(100) substrates in a mixture of Ar and N 2 plasma. The nitrogen partial pressure was varied to produce and control the stoichiometric forms obtained. All the Cr-Zr-N films exhibited a nanostructure with an average grain size of less than 10 nm, as determined by X-ray diffractogram analysis, and were formed in the solid-solution. As the contents of nitrogen in the film increased, it lead to changes in the crystal texture and competitive growth. The maximum root mean square roughness was 7.87 nm at a 20% nitrogen partial pressure and the roughness tended to decrease as the grain size decreased. The nano-indentation showed that the films grown at a 20% nitrogen partial pressure and annealed at 700 C had the highest reduced modulus and hardness at 349.2 and 35.1 GPa, respectively. The mechanical properties of films can be improved by a post-annealing heat treatment. With respect to the electrical properties of these films, the sheet resistance, which is related to the defect level, tended to increase as the nitrogen partial pressure increased.

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Mechanical, tribological, and biocompatibility properties of ZrN‐Ag nanocomposite films

Kertzman

Marchal

Suárez³

et al. 2007

J Biomedical Materials Res

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Nanocomposite films of ZrN-Ag were produced by reactive unbalanced magnetron sputtering, and their structural, chemical, mechanical, tribological, haemocompatibility, and antibacterial properties were studied as a function of film composition. The films formed a dense and homogeneous microstructure whereby nanocrystals of Ag are distributed evenly throughout the ZrN matrix. For small additions of silver, the hardness was found to increase, whereas the elastic modulus was found to decrease drastically. In the process of optimizing the deposition conditions, three kinds of coatings were prepared on 316 L surgical steel and tested by accelerated electrochemical polarization tests in order to detect the influence of Ag and the value of the bias potential on the corrosion performance of the system. Films produced under the optimum deposition conditions were, subsequently, deposited on medical grade Ti-Al-V and worn against ball-bearing steel using a ball-on-disk tribotester in bovine serum and were found to have superior tribological properties compared with single-phase ZrN coatings. The haemocompatibility of the films was assessed by investigating the adsorption of human serum albumin and fibrinogen on samples with different phase compositions. Quantification of the protein adsorption was carried out using spectroscopic ellipsometry, which confirmed the haemocompatibility of the films. Antibiotic activity of the films was quantified by incubating the films in bacterial cultures, namely, Staphylococcus epidermis, Staphylococcus aureus, and Escherichia coli. Films with a silver content > 10% exhibited superior antibacterial activity compared with the uncoated samples.

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Physical and mechanical properties of chromium zirconium nitride thin films

Cited by 44 publications

References 24 publications

Characterisation of R.F. magnetron sputtered Cr-N, Cr-Zr-N and Zr-N coatings

Characterisation of R.F. magnetron sputtered Cr-N, Cr-Zr-N and Zr-N coatings

Growth and Structural Characterizations of Nanostructured Chromium-Zirconium-Nitride Thin Films for Tribological Applications

Mechanical, tribological, and biocompatibility properties of ZrN‐Ag nanocomposite films

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