Abstract-In this paper, the epi layer of npn SOI HBT with n+ buried layer has been studied through Sentaurus process and device simulator. The doping value of the deposited epi layer has been varied for the npn HBT to achieve improved f t BV CEO product (397 GHzV). As the BV CEO value is higher for low value of epi layer doping, higher supply voltage can be used to increase the f t value of the HBT. At 1.8 V V CE , the f t BV CEO product of HBT is 465.5 GHzV. Further, the film thickness of the epi layer of the SOI HBT has been scaled for better performance (426.8 GHzV f t BV CEO product at 1.2 V V CE ). The addition of this HBT module to fully depleted SOI CMOS technology would provide better solution for realizing wireless circuits and systems for 60 GHz short range communication and 77 GHz automotive radar applications. This SOI HBT together with SOI CMOS has potential for future high performance SOI BiCMOS technology.