Physical properties of (La,Sr)Ti(O,N)3 thin films grown by pulsed laser deposition

Perovskite-related oxynitrides – Recent developments in synthesis, characterisation and investigations of physical properties

“…From SEM investigations of the surface and the crosssection it was deduced that the films grown by PLD are very dense and show only a small surface roughness. The latter was quantitatively measured by AFM and found to vary between 5 and 15 nm and to decrease with increasing La/N content [51]. As one representative example Fig.…”

“…The substrates were kept at 800 C during ablation. These oxide films were afterwards nitridated at 950 C for 3 h [51].…”

Pulsed laser deposition and characterization of nitrogen-substituted SrTiO3 thin films

“…Therefore PLD and its modifications are especially suitable for a one-step deposition of N-doped SrTiO 3 films as different sources of reactive nitrogen can be used in different modifications of PLD. An alternative way is a two-step preparation of N-substituted films, consisting of the deposition of oxide film and its subsequent thermal ammonolysis [5]. It has been shown that partial substitution of nitrogen for oxygen in SrTiO 3 (several at.%) reduces the dielectric leakage current [6] and also induces the formation of localised energy levels inside the SrTiO 3 band gap, thus providing Nitrogen-substituted cubic perovskite-type SrTiO 3 thin films were deposited in a one-step process using pulsed reactive crossed beam laser ablation (PRCLA) and RF-plasma assisted pulsed laser deposition (RF-PLD).…”

Structural and dielectric properties of oxynitride perovskite LaTiOxNy thin films

“…We reported on La-Ti-O-N films deposited by sputtering deposition [12,13]. (La 1 − x Sr x )-Ti-O-N films are reported as deposited by sol gel method [14] and laser ablation [15]. La-Ti-O-N thick layers were also obtained through ammonolysis of LaTiO 3.5 single-crystals [16].…”