1986
DOI: 10.1007/978-3-642-82695-5
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Physisorption Kinetics

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Cited by 78 publications
(81 citation statements)
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“…Since the enthalpies of adsorption for the noble gases are essentially zero [5], the average distance traveled per particle, L, through the target/vapor transport system can be determined from Eq. 2.…”
Section: Discussionmentioning
confidence: 99%
“…Since the enthalpies of adsorption for the noble gases are essentially zero [5], the average distance traveled per particle, L, through the target/vapor transport system can be determined from Eq. 2.…”
Section: Discussionmentioning
confidence: 99%
“…Below, we sketch a quantum-kinetic approach to calculate s e and τ e from a simple microscopic model for the plasma boundary interaction which treats the interaction of electrons with plasma boundaries as a physisorption process [30,31,32,33,34,35,36,37,38,39,40] in the polarization-induced attractive part of the surface potential. Electron surface states [41,42,43,44,45,46,47,48,49,50,51,52,53,54,55], at most a few nm away from the boundary, will thus play a central role as will surfacebound scattering processes which control electron energy relaxation at the surface and thus electron sticking and desorption.…”
Section: −1 Imentioning
confidence: 99%
“…Usually, heavy particles, such as ions, couple rather strongly to vibrational excitations of the boundary [36,39]. They can thus dissipate energy very efficiently which usually leads to a large sticking coefficient.…”
mentioning
confidence: 99%
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