We demonstrated 1.5-µm-band optical switching using the Kerr effect in a-Si:H photonic crystal nanocavities. Switching with pulse energies down to 18 fJ using a degenerate pump-probe technique was observed in cavities with Q-factors up to 30,000.Photonic crystal (PhC) nanocavities offer a means by which nonlinear optical effects can be strongly enhanced for applications in optical communications and all-optical logic [1]. Due to their high Q-factors and very small mode volumes (below (λ /n) 3 ), optical switching in PhC cavities using bulk optical nonlinearities in III-V materials at energies below 1 fJ has been demonstrated [2]. A desire for CMOS-compatible optical materials makes the investigation of optical switching in silicon compelling, but the dominant optical nonlinearity in crystalline silicon in the 1.5-µm telecom band is plasma dispersion due to free carriers created by two-photon absorption [3]. Hydrogenated amorphous silicon (a-Si:H), which is compatible with back-end-of-line CMOS integration, has been shown to be a promising nonlinear optical material due to its high Kerr figure-of-merit [4,5], but to our knowledge, Kerr-effect-based nonlinear optics in high-Q a-Si:H PhC nanocavities has not been demonstrated to date.Lithography and dry etching of a-Si:H PhC cavities was performed at an R&D CMOS foundry in Singapore (IME A-STAR). Subsequent post-processing (photolithography and wet etching) was used to create free-standing a-Si:H membrane PhC cavities. The devices used in this work contained 5-hole linear defect cavities evanescently coupled to PhC waveguides (see Fig. 1, left panel) [6]. PhC waveguides were butt-coupled to a-Si:H wire waveguides, which were fully encapsulated in SiO 2 , and light was coupled into and out of the a-Si:H waveguides using grating couplers. The total throughput was approximately -19 dBm, with the losses dominated by the grating couplers.Optical switching experiments were performed using a degenerate pump-probe technique, a schematic of which is shown in the right panel of Fig. 1, and is similar to that used in [2]. A cw diode laser was modulated by a 40-Gbps electro-optic intensity modulator (EOM) to produce 37-ps FWHM pulses with a repetition rate of 100 MHz. This modulated beam was amplified using an erbium-doped fiber amplifier (EDFA) and was split into two paths with a 99/1 fiber splitter. The high-power (pump) arm was sent through a variable attenuator (VATT), and the low-power (probe) arm was sent through a motorized delay line and was chopped (at 43 kHz) using an acousto-optic modulator (AOM), before being combined with the pump in a 3-dB coupler and coupled into the chip using the integrated grating coupler. At the output, the probe was measured using a lock-in technique. Switching traces were measured by scanning the cw EDFA Laser source VATT DUT 99% 1%