Picosecond laser fabrication of nanostructures on ITO film surface assisted by pre-deposited Au film

Yang, Huizhu; Jiang, Gedong; Wang, W. J.; Mei, Xuesong; Pan, An; Zhai, Zhen

doi:10.1007/s00340-017-6822-8

Cited by 6 publications

(3 citation statements)

References 32 publications

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“…Depositing gold film as a buffer layer is another promising method, as shown be Feng et al, who obtained large-area uniform structures on silicon [24]. Materials assisted by gold films were subsequently investigated, such as indium-tin-oxide(ITO)films [25], sapphire [26], and aluminum [27]. However, present studies on different buffer layers are still limited.…”

Section: Introductionmentioning

confidence: 99%

Quality Improvement of Laser-Induced Periodic Ripple Structures on Silicon Using a Bismuth-Indium Alloy Film

Chen

Shan

et al. 2021

Applied Sciences

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In this work, a new buffer layer material, a bismuth-indium (Bi-In) alloy, was utilized to improve the quality of large-area, laser-induced periodic ripple structures on silicon. Better-defined ripple structures and larger modification areas were obtained at different scanning speeds by pre-depositing a Bi-In film. The single-spot investigations indicated that ripple structures were much easier to form on silicon coated with the Bi-In film under laser fluences of 2.04 and 2.55 J/cm2 at a fixed pulse number of 200 in comparison with on bare silicon. A physical model in terms of the excellent thermal conductivity contributed by the free electrons in the Bi-In film homogenizing the thermal distribution caused by the laser irradiation in the early stage of the formation of laser-induced periodic surface structures was proposed to explain the above phenomena. The results show that the Bi-In film enabled a wider range of laser fluences to generate periodic structures and helped to form regular ripple structures on the silicon. In addition, the modulation effects of the laser fluence and pulse number on surface structures were studied experimentally and are discussed in detail.

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Section: Introductionmentioning

confidence: 99%

Quality Improvement of Laser-Induced Periodic Ripple Structures on Silicon Using a Bismuth-Indium Alloy Film

Chen

Shan

et al. 2021

Applied Sciences

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“…As the study of a single-layer film in our previous research [ 24 , 25 ] showed, there are some problems with the laser processing of high-transmittance thin films. When the laser irradiates the surface of ITO thin films (a typical high-transmittance material), most of the energy passes through the film and is deposited at the interface of the ITO thin film and its glass substrate.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond Laser Fabrication of Micro and Nano-Structures on CIGS/ITO Bilayer Films for Thin-Film Solar Cells

et al. 2021

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Cu(In, Ga)Se2 (CIGS) thin films have attracted considerable interest as potential photovoltaic solar cells. Moreover, several current studies are focusing on improving their conversion efficiency. This study proposes a method to process micro- and nanostructures onto the surface of CIGS/ITO bilayer films to broaden the field of solar cell application. The bilayer films exhibited optical characteristics different from those of a single-film during processing. Field intensities at different layer positions of the CIGS/ITO bilayer films were analyzed, and different structures were fabricated by varying a set of parameters. Ripples were obtained using a pulse energy of 0.15 μJ and scanning speeds in the range of 0.1–1 mm/s, but after increasing speed to 3–5 mm/s, ripple structures were produced that had a large period of several microns and spatial porous nanostructures. This pattern exhibited low reflectivity. Optimal structures were obtained at a scanning speed of 3.5 mm/s a pulse energy of 0.15 μJ, and a reflectivity lower than 5%. Large areas characterized by micron-sized ripple structures and accompanied by nanoscale porous structures presented high optical performance and efficiency, which can be used to broaden the application of thin film-based solar cells.

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“…The surface roughness was attributed to the irregularity in the spatial period of features and the splitting was attributed to transformation of LSFL to HSFL. Yang et al [39] proposed that the deposition of an additional Au thin film on the ITO film before laser irradiation can help in generating smooth LIPSS features. It was explained that the pre-deposited Au thin film causes the aggregation of surface energy necessary to induce initial structures.…”

Section: Introductionmentioning

confidence: 99%

Onset and evolution of laser induced periodic surface structures on indium tin oxide thin films for clean ablation using a repetitively pulsed picosecond laser at low fluence

Farid¹,

Dasgupta²,

O’Connor³

2018

J. Phys. D: Appl. Phys.

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The onset and evolution of laser induced periodic surface structures (LIPSS) is of key importance to obtain clean ablated features on indium tin oxide (ITO) thin films at low fluences. The evolution of subwavelength periodic nanostructures on a 175 nm thick ITO film, using 10 ps laser pulses at a wavelength of 1032 nm, operating at 400 kHz, is investigated. Initially nanoblisters are observed when a single pulse is applied below the damage threshold fluence (0.45 J cm−2); the size and distribution of nanoblisters are found to depend on fluence. Finite difference time domain (FDTD) simulations support the hypothesis that conductive nanoblisters can enhance the local intensity of the applied electromagnetic field. The LIPSS are observed to evolve from regions where the electric field enhancement has occurred; LIPSS has a perpendicular orientation relative to the laser polarization for a small number (<5) of applied pulses. The LIPSS periodicity depends on nanoblister size and distribution; a periodicity down to 100 nm is observed at the lower fluence periphery of the Gaussian irradiated area where nanoblisters are smallest and more closely arranged. Upon irradiation with successive (>5) pulses, the orientation of the periodic structures appears to rotate and evolve to become aligned in parallel with the laser polarization at approximately the same periodicity. These orientation effects are not observed at higher fluence—due to the absence of the nanoblister-like structures; this apparent rotation is interpreted to be due to stress-induced fragmentation of the LIPSS structure. The application of subsequent pulses leads to clean ablation. LIPSS are further modified into features of a shorter period when laser scanning is used. Results provide evidence that the formation of conductive nanoblisters leads to the enhancement of the applied electromagnetic field and thereby can be used to precisely control laser ablation on ITO thin films.

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Picosecond laser fabrication of nanostructures on ITO film surface assisted by pre-deposited Au film

Cited by 6 publications

References 32 publications

Quality Improvement of Laser-Induced Periodic Ripple Structures on Silicon Using a Bismuth-Indium Alloy Film

Quality Improvement of Laser-Induced Periodic Ripple Structures on Silicon Using a Bismuth-Indium Alloy Film

Femtosecond Laser Fabrication of Micro and Nano-Structures on CIGS/ITO Bilayer Films for Thin-Film Solar Cells

Onset and evolution of laser induced periodic surface structures on indium tin oxide thin films for clean ablation using a repetitively pulsed picosecond laser at low fluence

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