Picosecond pulsed laser deposition of metal-oxide sensing layers with controllable porosity for gas sensor applications

Surface Acoustic Wave Hydrogen Sensors Based on Nanostructured Pd/WO3 Bilayers

“…The development of sensitive gas sensors is an active research domain due to the serious safety hazard problems implied by its use [1,2,3,4]. WO 3 is a wide band gap n-type metal oxide semiconductor, which is used for detecting various gases [2].…”

“…WO 3 is a wide band gap n-type metal oxide semiconductor, which is used for detecting various gases [2]. In the case of hydrogen sensing, satisfactory results are obtained only when combined with catalytic metals such as Pt [5] or Pd [6,7], which lead to the dissociation of H 2 and generates H + ions and electrons, which diffuse into the WO 3 layer.…”

One‐Step Fabrication of Nanocrystalline Nanonetwork SnO2 Gas Sensors by Integrated Multilaser Processing

“…An alternative method to control crystallization is to postanneal the amorphous thin films in furnace after PLD, but the grain size and nanostructures would change after furnace heating. [18] Ultrafast laser ablation is promising to improve the deposition area control of PLD by effectively shortening the targetto-substrate distance. As reported previously, homogeneous nanoparticles have been obtained on the surface of various bulk materials after ultrafast laser ablation.…”

“…An alternative method to control crystallization is to postanneal the amorphous thin films in furnace after PLD, but the grain size and nanostructures would change after furnace heating. [ 18 ]…”

“…[14,15] In addition to thermal evaporation, pulsed laser deposition (PLD) is among the popular choices to improve the fabrication of nanocrystalline metal oxide gas sensors. [16][17][18] In this case, the intense pulsed laser, normally a nanosecond laser, ablates An integrated multilaser process is developed to fabricate nanocrystalline nanonetwork SnO 2 gas sensors in one integrated procedure, which combines electrodes fabrication, nanomaterials deposition, and postannealing. Interdigit electrodes are fabricated on an Au-coated fused silica substrate using a picosecond (ps) laser, which ablates the Au coating from the back of the substrate to pattern the electrodes.…”