Piezo impact system for printed board sub-micron precision positioning

Mendes, José Jair Alves; Yamagata, Yuuki; Higuchi, Takehiko

doi:10.1109/aim.1997.652935

Cited by 1 publication

(3 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The structure of IDEs affects the distribution of the electric field strength. Therefore, it affects the electrical and dielectric coefficients of Equation (6). IDEs are another key factor that affects the component performance.…”

Section: Piezoelectric Component Dynamic Equationmentioning

confidence: 99%

“…Piezoelectric actuators have the advantages of a high resolution, high frequency response, low power consumption and strong anti-electromagnetic interference ability. Therefore, they have been widely used in precision drive fields, such as microelectronic mechanical systems, microrobots, aerospace and biomedical engineering [1][2][3][4][5][6]. A precision micropositioner using piezoelectric components as the actuators can overcome the shortcomings of conventional positioning devices and have unique advantages in micron and sub-micron precision positioning control [6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, they have been widely used in precision drive fields, such as microelectronic mechanical systems, microrobots, aerospace and biomedical engineering [1][2][3][4][5][6]. A precision micropositioner using piezoelectric components as the actuators can overcome the shortcomings of conventional positioning devices and have unique advantages in micron and sub-micron precision positioning control [6][7][8][9][10]. According to previous research results, piezoelectric actuators could include conventional piezoelectric components [11,12], piezoceramic bimorphs [13][14][15], piezoelectric stacks [16,17] and composite structures, etc.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Finite Element Analysis and Polarization Test of IDEs Piezoelectric Actuator

et al. 2022

View full text Add to dashboard Cite

A new type of actuator is presented in the paper that integrates the IDEs into a conventional piezoelectric sheet. The electrodes and polarization play a key role in the strain. Adopting constitutive equations of piezoelectric theory and variation principles in elasticity theory, the piezoelectric component dynamic equation was deduced. Several finite element models of the IDEs piezoelectric actuator were established in ANSYS. The effect of branch electrodes on the strain of the actuator was analyzed. The results show that the strain can be bigger than that of the conventional piezoelectric sheet by decreasing the gap and increasing the width of electrodes. According to the FEM result, some IDEs piezoelectric actuators were prepared. The distribution of the static electric field inside the actuator was researched to determine the polarization voltage. The 2671 high voltage power and DU-20 temperature-controlled oil bath was applied to explore the polarization process. The effect of the voltage, time and temperature on the strain of the actuator was researched by a TF2000 and SIOS laser interferometer. The results show that the optimum polarization is 800 V, for 60 min and at 150 ℃. The strain of the IDEs piezoelectric actuator is 1.87 times that of the conventional piezoelectric actuator. The actuators could prove to be helpful applications for micro-nano devices.

show abstract

Section: Piezoelectric Component Dynamic Equationmentioning

confidence: 99%