2020
DOI: 10.1016/j.eml.2020.100968
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Piezo-micro-ultrasound-transducers for air-coupled arrays: Modeling and experiments in the linear and non-linear regimes

Abstract: The paper is focused on the multi-physics modelling, via the finite element method (FEM), of a 4x4 air-coupled array of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs), and on its mechanical and acoustic validation by means of the comparison, in the time domain, with experimental results.

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Cited by 12 publications
(5 citation statements)
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“…Applications to real-world engineering problems are numerous and tend to increase since lightweight thinner structures are being increasingly used. The range of applications thus spans from aeronautics to transportation industry [114,163,179,216,224,226,232,271], wind energy systems [74,160], musical instruments [30,106,184] and micro-/nanoelectromechanical systems (M/NEMS), in which those nonlinearities must be mastered to design efficient structures [61,138,164,245,322]. The vibratory phenomena arising from the nonlinear dynamics of geometrically nonlinear structures can also be intentionally used for the purpose of new designs, especially in the M/NEMS domain or for energy harvesting, where for example internal resonances or parametric driving are conceived with specific goals [58,96,148,157,231,248,258,270,319].…”
Section: Introductionmentioning
confidence: 99%
“…Applications to real-world engineering problems are numerous and tend to increase since lightweight thinner structures are being increasingly used. The range of applications thus spans from aeronautics to transportation industry [114,163,179,216,224,226,232,271], wind energy systems [74,160], musical instruments [30,106,184] and micro-/nanoelectromechanical systems (M/NEMS), in which those nonlinearities must be mastered to design efficient structures [61,138,164,245,322]. The vibratory phenomena arising from the nonlinear dynamics of geometrically nonlinear structures can also be intentionally used for the purpose of new designs, especially in the M/NEMS domain or for energy harvesting, where for example internal resonances or parametric driving are conceived with specific goals [58,96,148,157,231,248,258,270,319].…”
Section: Introductionmentioning
confidence: 99%
“…PMUTs are Micro-Electro-Mechanical Systems (MEMS)-based piezoelectric ultrasonic transducers generating ultrasonic waves that can propagate in air [ 15 , 16 , 17 , 18 , 19 , 20 ], liquid [ 21 , 22 , 23 ], or solid media [ 24 ]. Piezoelectric materials are used in a wide range of smart micro-systems [ 25 , 26 ].…”
Section: Introductionmentioning
confidence: 99%
“…Micromachined ultrasonic transducers (MUTs) with a flexible diaphragm structure [10]- [12], have recently been identified as a promising alternative to conventional ultrasonic transducers due to their good acoustic impedance matching [13], [14], broad bandwidth [15], [16], inexpensive array fabrication, and ease of integration with supporting electronics [14], [17]- [19]. Piezoelectric micromachined ultrasonic transducers (PMUTs), which are generally diaphragm-like thin film flexural transducers manufactured on silicon substrates, are a possible option for integrated transducer arrays [20]- [22].…”
Section: Introductionmentioning
confidence: 99%