Piezo resistive thin film sensor system

Abstract

This paper presents the latest investigations of thin film sensor developments based on amorphous hydrogenated carbon films. The piezo resistive layer is deposited in a plasma enhanced chemical vapour deposition process in a thickness of 4-6 m. The advantage of this film is a excellent tribological behaviour with a hardness of 20-40 GPa and a coefficient of friction of 0,2 as it is well known from the diamond like carbon layers combined with a piezo resistive characteristic. This layer can detect loads without the need of elongation. A special sensor system in the shape of a washer can be easily integrated in screw joints to detect the normal load distribution

Piezoelectric sensors for taxiway airport traffic control system

“…Piezoelectric thin films are considered emergent materials for integration within Micro Systems Technology (MST) or Micro Electro Mechanical (MEM) devices. Plenty of research activities for the piezoresistive thin film has been shown worldwide [17][18][19][20]. While the strain sensitivity of piezoelectric is 50,000 times the one of piezoresistive thin film [14], piezoresistive thin film is appropriate in a lab setting to detect the moving objects that weights much less than the airplanes or moving vehicles in airport field.…”

The Effect of Sensor Integration on the Load Carrying Capacity of Gears

“…The concepts of a smart bearing have also been discussed recently by Schirra, T. et al [28,29]. Other examples for sensor integration in mechanical components include feather key [30], fasteners [31,32], ball screw (e.g., [33,34]) and die (seen as part of the overall stamping system) [35].…”