Piezoelectric circular microdiaphragm based pressure sensors

Olfatnia, Mohammad; Xu, Ting; Miao, Jianmin; Ong, Lin Seng; Jing, Xiangmeng; Norford, L.K.

doi:10.1016/j.sna.2010.06.016

Cited by 37 publications

(22 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Especially PZT films combined with a standard CMOS process result in novel sensor and actuator devices like accelerometers [1], pressure sensors [2], motors [3], and ultrasonic transducers [4].…”

Section: Introductionmentioning

confidence: 99%

Nano-patterned PZT films for perspective functional materials

Waegner

Suchaneck

Gerlach

et al. 2012

Proceedings of ISAF-ECAPD-PFM 2012

View full text Add to dashboard Cite

In this work, we describe the fabrication of PZT nanodisc arrays isolated by a polymer layer and contacted with a top electrode. PZT thin films were deposited by multi-target sputtering onto a platinum/titanium bottom electrode and structured by means of nanosphere lithography. To guarantee short-circuit-free evaporation of a top electrode, the space between the nanostructures was filled by a polymer. Two approaches for the filling are demonstrated: (i) imprinting and (ii) skim coating. Single nanodiscs embedded in a flexible polymer matrix have two major advantages. First, taking into account the flexibility of the matrix they can vibrate freely in lateral direction and, second, due to shrinking to the nanoscale, predominant directions of the polarization form, such as vortexor bubble-like domain patterns. Piezoresponse force microscopy was performed on patterned and non-patterned samples with and without a top electrode to check the local piezoresponse. Comparison of both samples revealed an increase in lateral piezoactivity for patterned samples while the out-of-plane piezoresponse remained constant.

show abstract

Section: Introductionmentioning

confidence: 99%

Nano-patterned PZT films for perspective functional materials

Waegner

Suchaneck

Gerlach

et al. 2012

Proceedings of ISAF-ECAPD-PFM 2012

View full text Add to dashboard Cite

show abstract

“…In these sensors the stiffness variation of the resonating element attached to the diaphragm as in [5] or the stiffness variation of the vibrating diaphragm is converted into resonance frequency shift which can be sensed using piezoelectric, electrostatic, optical and piezoresistive based secondary sensors giving a direct measure of pressure. There are several resonant pressure sensors using MEMS technology have been proposed as in [6,7].…”

Section: Introductionmentioning

confidence: 99%

T-shaped resonating beam pressure sensor

Sujan

Vasuki

Uma

2012

2012 10th IEEE International Conference on Semiconductor Electronics (ICSE)

View full text Add to dashboard Cite

A resonant pressure sensor with a provision for incorporating appropriate actuation and detection mechanism using fully surface micromachined process is presented in this paper. The pressure sensing element is a Tshaped resonating beam encapsulated beneath a polysilicon rectangular diaphragm and fully enclosed in a sealed vacuum cavity. This design enables high pressure sensitivity, miniature chip size and as well as good environmental isolation. The proposed structure is evaluated for pressure sensitivity theoretically and numerically using MEMS CAD tool CoventorWare. The pressure sensitivity of the sensor with a T-shaped 1.2 µm thick beam is found to be 10.2%/bar with the beam resonance frequency of about 792 kHz.

show abstract

“…Micro-or nanoelectromaechanical resonant sensors are devices whose resonant frequency shifts as a function of a physical or chemical parameter [1][2][3][4]. Modeling these sensors regardless of their shapes and applications as a simple one-dimensional damped harmonic oscillator will result the familiar equation of motion [5] ( ) ( ) ( ) ( ) …”

Section: Introductionmentioning

confidence: 99%

Analysis of acoustic radiation and viscous damping on the vibration of piezoelectric circular microdiaphragms

Olfatnia

Kottapalli

et al. 2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

Self Cite

View full text Add to dashboard Cite

In this study, an analytical calculation was performed by using the Navier-Stokes equation for Newtonian fluids to investigate influences of acoustic radiation and viscous damping on the frequency and quality factor of piezoelectric circular microdiaphragms (PCM). Theoretical model shows that the ratio of contribution of viscosity over acoustic radiation term on the frequency shift of PCM mainly depends on (υ/h cp ) 0.5 . This means, besides the kinematic viscosity, the thickness and the sound velocity in the plate are also two significant parameters in viscosity influences on the frequency shift of PCM. Throughout the work, theoretical and experimental values were compared and fairly good correlation was observed.

show abstract

Piezoelectric circular microdiaphragm based pressure sensors

Cited by 37 publications

References 12 publications

Nano-patterned PZT films for perspective functional materials

Nano-patterned PZT films for perspective functional materials

T-shaped resonating beam pressure sensor

Analysis of acoustic radiation and viscous damping on the vibration of piezoelectric circular microdiaphragms

Contact Info

Product

Resources

About