Piezoelectric disk flexure resonator with 1 dB loss

Rudy, Ryan Q.; Pulskamp, Jeffrey S.; Bedair, Sarah S.; Puder, Jardena J.; Polcawich, Ronald G.

doi:10.1109/fcs.2016.7546788

Cited by 12 publications

(2 citation statements)

References 9 publications

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“…As the DC bias voltage increases, the stress within the structure induced by the piezoelectric layer increases thus influencing the resonant frequency of the device [10]. Unlike electrothermal tuning, piezoelectric tuning has shown a noticeable increase in transmission magnitude (decrease of the motional resistance) and a decrease of the Q factor in air, corresponding to our previous findings with piezoelectrically transduced doubleclamped beam resonators [10], as well as other research groups [9], [39]- [42].…”

Section: B Piezoelectric Tuningsupporting

confidence: 77%

Thermal- and Piezo-Tunable Flexural-Mode Resonator With Piezoelectric Actuation and Sensing

Sviličić

Wood

Mastropaolo

et al. 2017

J. Microelectromech. Syst.

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This paper reports on a piezoelectrically actuated and sensed flexural-mode microelectromechanical (MEMS) resonant device with electrothermally and piezoelectrically tunable resonant frequency. The device is designed as a multilayer circular membrane (diaphragm) resonator with a lead-zirconium-titanate piezoelectric actuator and sensor as well as platinum electrothermal tuning electrodes placed on the top of a silicon-carbide diaphragm. The design enables active electrothermal frequency tuning independent of the piezoelectric input/output operation of the device. The performance of the fabricated device has been tested using two-port transmission frequency response measurements that are performed at atmospheric conditions. Electrothermal tuning and piezoelectric tuning introduce the unique feature of shifting the resonant frequency downward and upward, respectively. The resonant frequency has been tuned by applying DC voltages in the range 0 V-5 V. The measurements have shown that an 886 kHz device exhibits a frequency tuning range of about-8,400 ppm when tuned electrothermally, and a tuning range of about +2,400 ppm when tuned piezoelectrically. Simulated results have shown that the wider frequency range for electrothermal tuning is a result of larger change in induced stress in the diaphragm for a given DC voltage, as well as the fact that the electrothermal tuning mechanism effectively serves to relax the residual tensile stress in the diaphragm.

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Section: B Piezoelectric Tuningsupporting

confidence: 77%

Thermal- and Piezo-Tunable Flexural-Mode Resonator With Piezoelectric Actuation and Sensing

Sviličić

Wood

Mastropaolo

et al. 2017

J. Microelectromech. Syst.

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“…The |S 21 | response of a flexurebased PZT resonator [89], designed with the technique described in [90], is shown in figure 17. The maximum |S 21 | of the resonator is −1 dB, with a FOM of 16.9.…”

Section: Flexure-based Resonatorsmentioning

confidence: 99%

Advances in piezoelectric PZT-based RF MEMS components and systems

Benoit

Rudy

Pulskamp

et al. 2017

J. Micromech. Microeng.

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There is continuing interest in radio frequency (RF) microelectromechanical system (MEMS) devices due to their ability to offer exceptional RF performance, high linearity and low power consumption. To date, there is an impressive amount of RF MEMS components such as; switches, resonators, varactors, and tunable inductors that have enabled smaller, cheaper and more efficient RF systems. RF MEMS devices contain micromachined components that have the ability to move so that a change in the mechanical state of a device will result in a change to the device’s RF properties. There are many common modes of actuation, including, but not limited to: electrostatic, magnetostatic, piezoelectric, and electrothermal actuation. Although there are attractive aspects and drawbacks to each of these technologies, this paper will focus on advances in the application of piezoelectric actuation, and in particular the use of lead zirconium titanate (PZT), for RF MEMS.

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Lead Zirconate Titanate (PZT) for M/NEMS

Polcawich

Pulskamp

2017

Microsystems and Nanosystems

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Piezoelectric disk flexure resonator with 1 dB loss

Cited by 12 publications

References 9 publications

Thermal- and Piezo-Tunable Flexural-Mode Resonator With Piezoelectric Actuation and Sensing

Thermal- and Piezo-Tunable Flexural-Mode Resonator With Piezoelectric Actuation and Sensing

Advances in piezoelectric PZT-based RF MEMS components and systems

Lead Zirconate Titanate (PZT) for M/NEMS

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