reflects the promising applications of magnetoelectrics including magnetic field sensors, transducers, microwave devices, oscillators, phase shifters, heterogeneous read/write devices, spintronic devices, and so on. [4][5][6] Among various multiferroics, BiFeO 3 has attracted great attention in the last two decades, being the unique materials to have ferroelectric and magnetic transition temperatures well above room temperature. [7,8] These properties make BiFeO 3 very appealing for the above mentioned applications. In addition, doping BiFeO 3 thin films with rare-earth [9][10][11] represents one of the possible ways to obtain magnetoelectric systems. Recently, an electrical control of magnetic order by manipulating chemical pressure within the material has been achieved by lanthanum substitution in the antiferromagnetic ferroelectric BiFeO 3 . [12] BiFeO 3 oxide system has a slightly distorted perovskite structure. Perovskite structures of general formula ABO 3 play an important role due to their appealing and variegate functional properties. [13] In fact, a wide variety of substitutions at both A and B sites is responsible for the great flexibility of the perovskite structure giving rise to a very large number of derivatives with subtle variations in structure.Great efforts have focused on optimizing undoped BiFeO 3 to enhance the room temperature ferromagnetism. Among the various methods, ion substitution is the most useful and widely applied method to improve the multiferroic properties of BiFeO 3.[14] In particular, a lot of attention has been dedicated on doping of various elements like rare-earth, alkaline-earth metals and transition metals at the A or B site of bismuth ferrite to improve its magnetoelectric properties. [15][16][17] Considerable efforts have been devoted to the synthesis of BiFeO 3 at the nanoscale level [18] and to the study of its ferroelectric properties, but for the above mentioned applications BiFeO 3 is required in thin film forms. Up to date, BiFeO 3 films have been deposited on various substrates using physical vapor deposition techniques such as pulsed laser deposition (PLD), [19][20][21][22] molecular beam epitaxy [23,24] and sputtering. [25][26][27] Atomic layer deposition has been recently applied to the deposition of thin or ultrathin films of BiFeO 3 using a laminar layer approach, alternating Bismuth ferrite (BiFeO 3 ) materials have been the subject of intense research activity in the last two decades. The great interest arises from the BiFeO 3 being one of the rare multiferroic compounds in which ferroelectricity and magnetism coexist at room temperature. To improve these properties several studies have been reported on the doping at the A and/or B sites of the BiFeO 3 perovskite structure. In this short review, the attention is focused to the synthesis of BiFeO 3 and BiFeO 3 doped with Ba or Dy at the A site and Ti at the B site through Metal Organic Chemical Vapor Deposition (MOCVD). The applied MOCVD process consists of an in situ one step approach using a multi-metal s...