Capacitance-voltage profiles, admittance spectra, deep-level spectra, current-voltage characteristics, and microcathodoluminescence ͑MCL͒ spectra were measured before and after electron irradiation of n-GaN/InGaN multi-quantum-well ͑MQW͒ structures typical of the active region of GaN/InGaN blue light emitting diodes. Electron irradiation produces strong compensation of the conductivity in the MQW and introduces interface traps with ionization energies of 100 and 190 meV, in addition to a broad band of interface traps closer to the middle of the bandgap, acceptor traps near E c − 1.1 eV and hole traps near E v + 0.9 eV in the GaN barriers and at the GaN/InGaN interfaces in the QWs. The dose of electrons at which measurable changes occur in the MCL spectra is 10 15 cm −2 , while measurable changes in the electrical properties are observed after doses exceeding 10 16 cm −2 electrons.Heterojunctions and quantum wells ͑QWs͒ of GaN and related InGaAlN alloys are of great importance for visible/UV light emitting diodes ͑LEDs͒ and laser diodes ͑LDs͒, 1 high-power/highfrequency/high-temperature field effect and bipolar transistors, 2 and solar-blind photodetectors. 2 For some applications it is essential for the devices to operate in the harsh radiation environment encountered in open-space modules or in military systems. The radiation hardness of GaN-based devices is 1-2 orders of magnitude higher than for their AlGaAs/GaAs counterparts, mainly due to the higher bond strength in GaN, leading to a lower number of primary radiation defects per incident particle. 3-6 The main defects introduced in GaN by electron or proton irradiation are several nitrogen-vacancyrelated or nitrogen interstitial/gallium vacancy-related electron traps with levels ϳ0.13 to 0.2 eV. 7-12 Neutron irradiation was shown to create disordered regions in which the Fermi level is pinned near E c − ͑0.9-1͒ eV. 13 The Fermi level pinning position is believed to be due to nitrogen-interstitial-related deep acceptors near E c − 1 eV and gallium interstitial-related deep donors near E c − ͑0.8-0.9͒ eV. 14 The latter centers were also observed in GaN samples irradiated with high-energy electrons, protons, or heavy ions. [10][11][12][13][14] For GaN/InGaN heterojunctions, QWs, and multiple QWs ͑MQWs͒, data on radiation defects is scarce. Irradiation of single-QW GaN/InGaN blue LEDs with fast neutrons leads to substantial degradation of parameters after the dose of 10 14 n/cm 2 . 15 Proton irradiation of green LEDs resulted in ϳ40% decrease of the light output after irradiation with 1.7 ϫ 10 12 cm −2 of 2 MeV protons. 16,17 The nature of radiation defects in QWs has not been studied in detail, and a better understanding of radiation-damage processes is necessary to optimize device performance. We performed experiments on undoped GaN/InGaN MQW structures mimicking the active layers of GaN/InGaN LEDs.
ExperimentalThe MQWs were grown by metallorganic chemical vapor deposition on basal-plane sapphire substrates. The samples consisted of a low-temperature GaN buffe...