Piezoelectric friction–inertia actuator—a critical review and future perspective

Zhang, Z. M.; An, Qi; Li, J. W.; Zhang, W. J.

doi:10.1007/s00170-011-3827-z

Cited by 131 publications

(56 citation statements)

References 55 publications

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“…So-called "stick and slip" stepper actuators are not considered here, as they are extensions of more general actuator types. Typically, they offer increased stroke lengths at the expense of decreased actuation speed [30].…”

Section: Actuatorsmentioning

confidence: 99%

Design Considerations for a Micromachined Proportional Control Valve

et al. 2012

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Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

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Section: Actuatorsmentioning

confidence: 99%

Design Considerations for a Micromachined Proportional Control Valve

et al. 2012

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“…For instance, both FDAs and IDMs can be viewed as specific PIFAs with respect to the general architecture of PIFAs. The discussion of this benefit is not within the scope of this paper, and for details the reader is directed to Zhang et al (2012). The present paper will derive another benefit from this generalization, i.e., its facility for classifying the knowledge of modeling and control of the specific types of PIFAs such as FDAs and IDMs in such a way that the general architecture serves as a common platform (i.e., the PIFA architecture) for comparison of different theories or technologies.…”

Section: Introductionmentioning

confidence: 99%

“…Given the rapid development of nanotechnology, nanopositioning is becoming increasingly important in devices such as aerospace positioning systems and scanning probe microscopes (Croft et al, 2000;Zhang et al, 2012;Higuchi et al, 1990). One generic requirement with these devices is the realization of an accurate long-range motion (accuracy: nanometers) or accurate motion along the full length of the range that the mechanical system permits.…”

Section: Introductionmentioning

confidence: 99%

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Modeling and control of piezoelectric inertia–friction actuators: review and future research directions

Liu

et al. 2015

Mech. Sci.

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Abstract. This paper provides a comprehensive review of the literature regarding the modeling and control of piezoelectric inertia-friction actuators (PIFAs). Examples of PIFAs are impact drive mechanisms (IDMs) and friction-driving actuators (FDAs). In this paper, the critical challenges are first identified in modeling and control of PIFAs. Second, a general architecture of PIFAs is proposed to facilitate the analysis and classification of the literature regarding modeling and control of PIFAs. This general architecture covers all types of PIFAs (e.g., FDAs, IDMs) and thus serves as a general conceptual model of PIFAs. There is an additional benefit with this general architecture of PIFAs, namely that it is conducive to innovation in PIFAs, as new specific PIFAs may be designed in order to tailor to a specific application (for example, both FDAs and IDMs are viewed as specific PIFAs). Finally, the paper presents future directions in modeling and control for further improvement of the performance of PIFAs.

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“…The modeling and control of PASSMDs are important research topics. However, although numerous prototypes and systems based on the stick-slip principle have been introduced (see [2,3] and chapter 2 of [4]), the proof-of-concept of individual drives is the main focus. There have been only few works concerning the physical modeling of micro-drives intensively [4][5][6][7][8][9][10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Improvements of Piezo-Actuated Stick–Slip Micro-Drives: Modeling and Driving Waveform

Nguyen

Mau

Meyer³

et al. 2018

Coatings

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Modeling and waveform optimization are important research topics for piezo-actuated stick-slip micro-drives. In this paper, the dynamics of piezo-actuated stick-slip micro-drives (PASSMDs) are theoretically investigated. We introduce an extended model taking the dynamics of the piezo actuators into account. The model combines the whole macroscopic movement of the drive's runner and actuators and the microscopic behavior of the frictional contacts in a hybrid dynamic simulation. The macroscopic movements are described via Newtonian mechanics, while the microscopic behavior is computed using the method of dimensionality reduction. Two important characteristics of the drive, the critical actuation amplitude and the force generation, are systematically analyzed. The numerical simulation results show a fine agreement with experimental data of the previously published work. The critical actuation amplitude is found to depend on the behavior of the guiding contacts, the dynamics of the actuators and their interaction. Furthermore, a novel driving waveform, which allows us to increase the operational velocity for the drive, is proposed. The waveform is derived by exploiting micro-vibration and considering the dynamic contact status. Simulation results show that the average velocity of the drive is heightened by about 15%. The performance of the drive is therefore improved.

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Piezoelectric friction–inertia actuator—a critical review and future perspective

Cited by 131 publications

References 55 publications

Design Considerations for a Micromachined Proportional Control Valve

Design Considerations for a Micromachined Proportional Control Valve

Modeling and control of piezoelectric inertia–friction actuators: review and future research directions

Improvements of Piezo-Actuated Stick–Slip Micro-Drives: Modeling and Driving Waveform

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