Piezoelectric over Silicon-on-Nothing (pSON) process

Sharma, Jaibir; Goh, Duan Jian; Merugu, Srinivas; Koh, Youngil; Ghosh, Sagnik; Khairy, Hazwani; Ng, Eldwin J.

doi:10.1109/ius52206.2021.9593772

Cited by 18 publications

(5 citation statements)

References 11 publications

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“…The chip bearing the suspended membrane waveguide is a 3 mm × 3 mm microfabricated silicon chip from the piezoelectric over silicon-on-nothing process (pSON), 71 Fig. 2C.…”

Section: Methodsmentioning

confidence: 99%

“…The device is a bulk Si chip featuring a 2 μm-thick Si membrane formed via the pSON process. 71 The membrane has a width of 100 μm that is constant across the device and forms a rectangular closed-loop with rounded corners (Fig. 2A).…”

Section: Device Design and Principlesmentioning

confidence: 99%

“…To advance the membrane approach pioneered by White and Vuillermet while preserving the batch fabrication and reproducibility qualities enabled by microfabrication, and improve the confinement of acoustofluidic effects, this study leverages a novel fabrication approach from piezoelectric over silicon-on-nothing (pSON). 71 The acoustofluidic capabilities come from a microfabricated membrane acoustic waveguide actuator (MAWA) which drives flexural waves for in-droplet acoustophoretic manipulations. The MAWA is composed of a 2 μm-thick silicon (Si) membrane over a sealed and seamless cavity topped with a piezoelectric thin film (Fig.…”

Section: Introductionmentioning

confidence: 99%

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Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation

et al. 2023

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“…The chip bearing the suspended membrane waveguide is a 3 mm × 3 mm microfabricated silicon chip from the piezoelectric over silicon-on-nothing process (pSON), 71 Fig. 2C.…”

Section: Methodsmentioning

confidence: 99%

Section: Device Design and Principlesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation

et al. 2023

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“…The piezoelectric Silicon-On-Nothing (pSON) 71 process is used to fabricate the thin suspended membrane forming the waveguide. This process requires a high-temperature annealing step to induce silicon migration inside the patterned substrate, effectively sealing off a seamless vacuum cavity buried inside the bulk silicon.…”

Section: Description Of the Mawamentioning

confidence: 99%

“…1d. The complex and detailed structures realized by the piezoelectric Silicon-On-Nothing (pSON) 71 process allows for the MAWA to distinguish itself from the exural plate wave transducers reported by White's group by leveraging the waveguiding property of a photolithographically-de ned membrane 72 and further develop the capabilities of localized GFWs in acousto uidics.…”

Section: Introductionmentioning

confidence: 99%

Cavity-Agnostic Acoustofluidic Functions Enabled by Guided Flexural Waves on a Membrane Acoustic Waveguide Actuator

Vachon,

Merugu,

Sharma

et al. 2023

Preprint

Self Cite

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This article presents an in-depth exploration of the acoustofluidic capabilities of guided flexural waves (GFWs) generated by a membrane acoustic waveguide actuator (MAWA). By harnessing the potential of GFWs, cavity-agnostic advanced particle manipulation functions are achieved, unlocking new avenues for microfluidic systems and lab-on-a-chip development. The localized acoustofluidic effects of GFWs arising from the evanescent nature of the acoustic fields they induce inside a liquid medium are numerically investigated to highlight their unique and promising characteristics. Unlike traditional acoustofluidic technologies, the GFWs propagating on the MAWA’s membrane waveguide allow for cavity-agnostic particle manipulation, irrespective of the resonant properties of the fluidic chamber. Moreover, the acoustofluidic functions enabled by the device depend on the flexural mode populating the active region of the membrane waveguide. Experimental demonstrations using two types of particles include in-sessile-droplet particle transport, mixing, and spatial separation based on particle diameter, along with streaming-induced counter-flow virtual channel generation in microfluidic PDMS channels. These experiments emphasize the versatility and potential applications of the MAWA as a microfluidic platform targeted at lab-on-a-chip development and showcase the MAWA’s compatibility with existing microfluidics systems.

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Thin-film PMUTs: a review of over 40 years of research

Roy

Lee

2023

Microsyst Nanoeng

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Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices’ design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author’s past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.

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Piezoelectric over Silicon-on-Nothing (pSON) process

Cited by 18 publications

References 11 publications

Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation

Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation

Cavity-Agnostic Acoustofluidic Functions Enabled by Guided Flexural Waves on a Membrane Acoustic Waveguide Actuator

Thin-film PMUTs: a review of over 40 years of research

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