Piezoelectric Properties and Microstructure of BaTiO&lt;sub&gt;3&lt;/sub&gt; Films on Heat-Resistant Stainless-Steel Substrates Deposited Using Aerosol Deposition

Kawakami, Yoshihiro; Watanabe, Masato; Arai, Ken‐ichi; Sugimoto, Satoshi

doi:10.14723/tmrsj.41.279

Cited by 10 publications

(8 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[ 12 ] Used temperatures vary depending on the functional material, but oftentimes exceed 800–1000 °C. [ 51–53 ] This of course contradicts the previously mentioned main advantage of the powder aerosol deposition method. Therefore, the following five questions arise: Why is a thermal post‐treatment of powder aerosol‐deposited films necessary at all? Why are functional properties of as‐deposited PAD films different than expected? What happens during annealing of PAD films? Which temperatures are necessary to achieve the best functional properties? Can bulk‐like functional properties be regained by thermal annealing? …”

Section: Introductionmentioning

confidence: 92%

See 1 more Smart Citation

What Happens during Thermal Post‐Treatment of Powder Aerosol Deposited Functional Ceramic Films? Explanations Based on an Experiment‐Enhanced Literature Survey

et al. 2020

View full text Add to dashboard Cite

Powder aerosol deposition (PAD) is a unique ceramic spray coating method that produces dense and well‐adhering thick‐films directly at room temperature, without requiring any heating or sintering. After the successful film formation, mechanical film properties like hardness or plasma resistance are remarkably good. However, when it comes to electrical properties like permittivity or electrical conductivity, the nanocrystalline structure of PAD films combined with high internal strains deteriorates partly the characteristic properties. The electrical conductivity may already be present within the as‐deposited films. However, it is mostly lowered by several orders of magnitude. Therefore, a thermal post‐deposition annealing is oftentimes required. In this work, electrically conducting films produced by powder aerosol deposition are surveyed based on published data. Their microstructural and electrical behavior during the post‐deposition annealing treatment is summarized and reasons for the lowered electrical conductivity are identified. Additionally, the processes taking place during annealing, which eventually allow to regain bulk‐like functional properties, are examined. A universal annealing behavior is found that leads to a quantitative recommendation for the suitable film annealing temperatures to regain the electrical conductivities.

show abstract

Section: Introductionmentioning

confidence: 92%

“…[12] Used temperatures vary depending on the functional material, but oftentimes exceed 800-1000 °C. [51][52][53] This of course contradicts the previously mentioned main advantage of the powder aerosol deposition method. Therefore, the following five questions arise:…”

Section: Introductionmentioning

confidence: 99%

What Happens during Thermal Post‐Treatment of Powder Aerosol Deposited Functional Ceramic Films? Explanations Based on an Experiment‐Enhanced Literature Survey

et al. 2020

View full text Add to dashboard Cite

show abstract

“…Thermal treatment of as-deposited films has been shown to enhance the functional properties of AD films in part through the reduction of internal residual stresses and electrical conductivity, [26][27][28] which increases the dielectric permittivity and polarizability [8,10] in addition to reducing the dielectric loss and providing better aging behavior [29]. Although grain growth has also been suggested as a possible mechanism to enhance the functional response, studies have typically required significantly higher annealing temperatures on the order to 1000 °C to achieve increased grain size [30]. Here, there is extensive work by Exner et al [26] showing the influence of thermal treatment on the microstructure as well as the electronic and ionic conductivity of AD films.…”

Section: Graphical Abstract Introductionmentioning

confidence: 99%

Room temperature deposition of freestanding BaTiO3 films: temperature-induced irreversible structural and chemical relaxation

et al. 2022

View full text Add to dashboard Cite

The room temperature aerosol deposition method is especially promising for the rapid deposition of ceramic thick films, making it interesting for functional components in energy, mobility, and telecommunications applications. Despite this, a number of challenges remain, such as an enhanced electrical conductivity and internal residual stresses in as-deposited films. In this work, a novel technique that integrates a sacrificial water-soluble buffer layer was used to fabricate freestanding ceramic thick films, which allows for direct observation of the film without influence of the substrate or prior thermal treatment. Here, the temperature-dependent chemical and structural relaxation phenomena in freestanding BaTiO3 films were directly investigated by characterizing the thermal expansion properties and temperature-dependent crystal structure as a function of oxygen partial pressure, where a clear nonlinear, hysteretic contraction was observed during heating, which is understood to be influenced by lattice defects. As such, aliovalent doping and atmosphere-dependent annealing experiments were used to demonstrate the influence of local chemical redistribution and oxygen vacancies on the thermal expansion, leading to insight into the origin of the high room temperature conductivity of as-deposited films as well as greater insight into the influence of the induced chemical, structural, and microstructural changes in room temperature deposited functional ceramic thick films. Graphical abstract

show abstract

“…The issue could be solved by using a FeCrAl based heat-resistant stainless-steel material containing aluminium. 20) An Al 2 O 3 layer of thermal oxidation is formed on the surface of FeCrAl stainless steel by annealing at high temperature in air. It functions as a barrier layer for diffusion between the BT film and stainless-steel during annealing at high temperature.…”

Section: Introductionmentioning

confidence: 99%

“…The piezoelectric constant d 31 exhibits ¹54 pm/V for the BT film annealed at 1200°C. 20) In this paper, by applying the above technology, the evaluation results on the vibration power generation energy by increasing the area of the BT film formed on the FeCrAl stainless-steel substrate is presented.…”

Section: Introductionmentioning

confidence: 99%

Increasing vibration power generation energy by increasing the area of BaTiO<sub>3</sub> thick film formed on stainless-steel substrate by aerosol deposition

Kawakami

2021

J. Ceram. Soc. Japan

Self Cite

View full text Add to dashboard Cite

In this paper, the results of evaluating vibration power generation by increasing the area of the BaTiO 3 (BT) film formed on a stainless-steel substrate by aerosol deposition (AD) is presented. FeCrAl-based heat-resistant stainless steel with a thickness of 0.1 mm was used as the substrate. BT films with a thickness of about 10¯m were formed on the substrate of six different shapes with different widths and lengths and BT films were annealed at 1000°C. Electrodes were formed on the surface of these samples, and the poling process with a voltage of 60 V was applied to prepare samples for evaluation. A weight was attached to the tip of these samples and set up in a cantilever state. A damped vibration under the same stress condition was applied to the BT film by pushing and snapping the tip of samples one time. The generated voltage on the load resistance connected in parallel to the BT film was measured and the generation energy was evaluated. As a result, it was confirmed that the generation energies of the samples with areas of 15 © 3 and 30 © 40 mm 2 were 0.17 and 39¯J, respectively. About 230 times as much energy was obtained by increasing the film area about 20 times. This result indicates that increasing the film area using AD method effectively increases the generation energy.

show abstract

Piezoelectric Properties and Microstructure of BaTiO<sub>3</sub> Films on Heat-Resistant Stainless-Steel Substrates Deposited Using Aerosol Deposition

Cited by 10 publications

References 22 publications

What Happens during Thermal Post‐Treatment of Powder Aerosol Deposited Functional Ceramic Films? Explanations Based on an Experiment‐Enhanced Literature Survey

What Happens during Thermal Post‐Treatment of Powder Aerosol Deposited Functional Ceramic Films? Explanations Based on an Experiment‐Enhanced Literature Survey

Room temperature deposition of freestanding BaTiO3 films: temperature-induced irreversible structural and chemical relaxation

Increasing vibration power generation energy by increasing the area of BaTiO<sub>3</sub> thick film formed on stainless-steel substrate by aerosol deposition

Contact Info

Product

Resources

About