Increasing vibration power generation energy by increasing the area of BaTiO₃ thick film formed on stainless-steel substrate by aerosol deposition

Abstract

In this paper, the results of evaluating vibration power generation by increasing the area of the BaTiO 3 (BT) film formed on a stainless-steel substrate by aerosol deposition (AD) is presented. FeCrAl-based heat-resistant stainless steel with a thickness of 0.1 mm was used as the substrate. BT films with a thickness of about 10¯m were formed on the substrate of six different shapes with different widths and lengths and BT films were annealed at 1000°C. Electrodes were formed on the surface of these samples, and the poling process with a voltage of 60 V was applied to prepare samples for evaluation. A weight was attached to the tip of these samples and set up in a cantilever state. A damped vibration under the same stress condition was applied to the BT film by pushing and snapping the tip of samples one time. The generated voltage on the load resistance connected in parallel to the BT film was measured and the generation energy was evaluated. As a result, it was confirmed that the generation energies of the samples with areas of 15 © 3 and 30 © 40 mm 2 were 0.17 and 39¯J, respectively. About 230 times as much energy was obtained by increasing the film area about 20 times. This result indicates that increasing the film area using AD method effectively increases the generation energy.

Young’s modulus and ferroelectric property of BaTiO3 films formed by aerosol deposition in consideration of residual stress and film thickness

“…The induced energy (U) of the bimorph or unimorph piezoelectric cantilever under bending vibration is expressed as 24)…”

“…According to previous studies, 24,27) the harvested energy is influenced by not only the thickness of the film deposited by AD but also film properties, such as piezoelectric coefficient, ferroelectric constant, and Young's modulus. Hence, an investigation of the correlation between the film structure and properties is required to improve energy harvesting performance.…”

“…To mitigate this issue, recently, aerosol deposition (AD) has been used to form thick piezoelectric films by impact loading of ceramics. [19][20][21][22] Kawakami et al 23,24) evaluated the piezoelectric properties of BaTiO 3 (BTO) films deposited by AD on different substrates and the energy generated when the film area increased. Zhuo et al 25) evaluated the mechanical and electrical properties of BTO films deposited by AD as a function of temperature.…”