Piezoelectric Vibrational Energy Harvester Using Lead-Free Ferroelectric BiFeO₃Films

Abstract

We have proposed that BiFeO3 films are suitable for piezoelectric vibrational energy harvester (VEH) applications, because BiFeO3 has high spontaneous polarization and low dielectric permittivity. We demonstrated that energy can be harvested by a micromachined VEH using a BiFeO3 film deposited using a sol–gel process. A VEH with a resonant frequency of ∼98 Hz produced an output voltage of 1.5 V·G-1 and electrical power of 2.8 µW·mm-3·G-2 (G=9.8 m/s2) at a load resistance of 1 MΩ. Using the analytical model for VEH, the generalized electromechanical coupling factor was estimated to be 0.41%. These results were comparable to those of the best-performing VEHs using other piezoelectric films.

Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester

“…The theoretical models are mainly divided into two categories: lumped parameter (LP) models [ 1 , 2 , 3 ] and distributed parameter (DP) models [ 4 , 5 , 6 ]. The research of materials mainly focuses on substrate materials [ 7 , 8 ], doping optimization [ 9 , 10 ] modification, and new piezoelectric materials [ 11 , 12 ]. Aluminum Nitride (AlN) piezoelectric film is an important energy-trapping film for the MEMS PVEH, and its doping modification has become a research hotspot.…”

One-step synthesis of BaTiO3/CaTiO3 core-shell nanocubes by hydrothermal reaction

“…Energy harvesting systems are attracting attention because Internet of Things (IoT), sensing systems, wearables, and implantable devices are proliferating [1][2][3]. Of particular interest are piezoelectric-driven energy harvesters, which have high efficiency in mechanical-to-electrical energy conversion [4][5][6]. Pb(Zr,Ti)O 3 (PZT) has a high piezoelectric coefficient and a high electromechanical coupling constant originating from the nanosized ordering regions of three different crystallographic phases -the ferroelectric tetragonal phase, the rhombohedral phase, and the interface, the so-called morphotropic phase boundary (MPB) [7][8][9].…”

Piezoelectric BiFeO3 Thin Films: Optimization of MOCVD Process on Si

“…The main deposition techniques that have been applied to the production of BiFeO 3 films are: chemical solution deposition [20,21], pulsed laser deposition (PLD) [22,23], sputtering [24], sol-gel [15,16], and metal organic chemical vapor deposition (MOCVD) [25][26][27][28]. So far, only sol-gel and sputtering have been applied to deposit BiFeO 3 film used in a piezoelectric harvester [28,29], due to their simplicity and low operating temperature, which enable the use of a wide variety of substrates. The latest results for photovoltaic oriented devices have been obtained by PLD deposited films [23].…”