Piezoresistive and electrical properties of Cr containing diamond-like carbon films

Gudaitis, Rimantas; Meškinis, Šarūnas; Šlapikas, K.; Andrulevičius, Mindaugas; Niaura, Gediminas; Tamulevičius, Sigitas

doi:10.1016/j.surfcoat.2011.08.040

Cited by 13 publications

(13 citation statements)

References 19 publications

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“…4b, Table 2). This is in good accordance with the model explaining piezoresistance phenomenon in diamond like carbon films [8,10] as well as with other studies on piezoresistivity of hydrogen free DLC films [12] and DLC films containing Ag [19,20] or Cr [18]. In those studies gauge factor of DLC films increased with sp 3 /sp 2 carbon bond ratio.…”

Section: Propertiessupporting

confidence: 92%

“…Tendency of the decrease of the gauge factor with the increase of Cu atomic concentration was found. It should be mentioned that the same trend was reported for DLC films containing Cr [18] and some DLC films containing Ni [23]. Tendency of the decrease of the gauge factor of DLC:Cu films with the increase of D/G area ratio was found, too (Fig.…”

Section: Propertiessupporting

confidence: 81%

“…However this increase is not so obvious as in the case of the R Vs Cu concentration graph. It should be mentioned that clear linear dependence of gauge factor Vs log(R) was reported for DLC films containing Cr [ [18] and undoped hydrogen free DLC films [12]. Fig.…”

Section: Accepted Manuscriptmentioning

confidence: 84%

“…In the case of the diamond like carbon films, this effect may be eliminated by depositing DLC films nanocomposite containing different metals -DLC nanocomposites. Till now piezoresistive properties of DLC films containing W [15][16][17], Ag [17,19,20], Ti [17], Cr [18], Sn [21], Ni [6,17,[22][23][24][25] were investigated and reported. However combination of the relatively high piezoresistive gauge factor (up to 14-16 and even 20-30) and zero temperature coefficient of resistance (TCR) was reported only for DLC films containing nickel [6,17,[22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%

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Piezoresistive properties of diamond like carbon films containing copper

Meškinis

Gudaitis

Vasiliauskas

et al. 2015

Diamond and Related Materials

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Section: Propertiessupporting

confidence: 92%

Section: Propertiessupporting

confidence: 81%

Section: Accepted Manuscriptmentioning

confidence: 84%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Piezoresistive properties of diamond like carbon films containing copper

Meškinis

Gudaitis

Vasiliauskas

et al. 2015

Diamond and Related Materials

Self Cite

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“…They deposited chromium and carbon by a non-reactive DCmagnetron sputter process. Gudaitis et al (2012) produced chromium carbide layers by means of an RF-reactive diode sputtering (as we did) and obtained gauge factors ranging from 2 for chromium rich layers up to 8 for carbon rich layers. Thus, our results on chromium carbide fit into the work of the cited authors.…”

Section: Film Morphologymentioning

confidence: 96%

Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology

Schultes¹,

Schmid-Engel²,

Schwebke³

et al. 2018

J. Sens. Sens. Syst.

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Abstract.We have produced granular films based on carbon and different transition metals by means of plasma deposition processes. Some of the films possess an increased strain sensitivity compared to metallic films. They respond to strain almost linearly with gauge factors of up to 30 if strained longitudinally, while in the transverse direction about half of the effect is still measured. In addition, the film's thermal coefficient of resistance is adjustable by the metal concentration. The influence of metal concentration was investigated for the elements Ni, Pd, Fe, Pt, W, and Cr, while the elements Co, Au, Ag, Al, Ti, and Cu were studied briefly. Only Ni and Pd have a pronounced strain sensitivity at 55 ± 5 at. % (atomic percent) of metal, among which Ni-C is far more stable. Two phases are identified by transmission electron microscopy and X-ray diffraction: metal-containing nanocolumns densely packed in a surrounding carbon phase. We differentiate three groups of metals, due to their respective affinity to carbon. It turns out that only nickel has the capability to bond and form a stable and closed encapsulation of GLC around each nanoparticle. In this structure, the electron transport is in part accomplished by tunneling processes across the basal planes of the graphitic encapsulation. Hence, we hold these tunneling processes responsible for the increased gauge factors of Ni-C composites. The other elements are unable to form graphitic encapsulations and thus do not exhibit elevated gauge factors.

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