Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Rangelow, Ivo W.; Ivanov, Tzv.; Ivanova, K.; Volland, Burkhard E.; Grabiec, P.; Sarov, Y.; Persaud, A.; Gotszalk, Teodor; Zawierucha, P.; Zielony, M.; Dontzov, D.; Schmidt, Bertram; Zier, M.; Nikolov, Nikolay; Kostic̆, I.; Engl, W.; Sulzbach, T.; Mielczarski, J.; Kolb, Stefan; Latimier, Du P.; Pedreau, R.; Djakov, V.; Huq, S. E.; Edinger, Klaus; Fortagne, Olaf; Almansa, A.; Blom, Hans‐Olof

doi:10.1016/j.mee.2007.01.219

Cited by 43 publications

(15 citation statements)

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“…Since the nineties's, several research groups have proposed and developed the parallelization of AFM operations in single chips containing up to thousands of cantilevers working in parallel [Minne et al, 1998;Lutwyche et al, 1999;Vettiger et al, 1999;Vettiger et al, 2000;Kawakatsu et al, 2002;Rangelow et al, 2007]. In many cases, instead of the optical lever method of commercial AFMs originally proposed by Meyer and Amer [1988], the deflection of each probe was measured using a piezoresistive sensor integrated in the cantilever.…”

mentioning

confidence: 99%

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Favre

Polesel-Maris

Overstolz

et al. 2011

J of Molecular Recognition

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Atomic force microscopy (AFM) investigations of living cells provide new information in both biology and medicine. However, slow cell dynamics and the need for statistically significant sample sizes mean that data collection can be an extremely lengthy process. We address this problem by parallelizing AFM experiments using a two-dimensional cantilever array, instead of a single cantilever. We have developed an instrument able to operate a two-dimensional cantilever array, to perform topographical and mechanical investigations in both air and liquid. Deflection readout for all cantilevers of the probe array is performed in parallel and online by interferometry. Probe arrays were microfabricated in silicon nitride. Proof-of-concept has been demonstrated by analyzing the topography of hard surfaces and fixed cells in parallel, and by performing parallel force spectroscopy on living cells. These results open new research opportunities in cell biology by measuring the adhesion and elastic properties of a large number of cells. Both properties are essential parameters for research in metastatic cancer development.

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mentioning

confidence: 99%

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Favre

Polesel-Maris

Overstolz

et al. 2011

J of Molecular Recognition

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“…Such a probes contain piezoresitors enabling the Wheatstone's bridge based deflection measurement [44,45]. A series of successful implementations of the 1-D or 2-D matrix multi-probe setups were presented, enabling increased scanning trough output of the AFM [46,47]. Moreover, such a probes can work in dark environment, therefore the advanced investigations of the optical-electrical properties of the material can be investigated.…”

Section: The Probe's Deflection Detection Systemsmentioning

confidence: 99%

Quantitative Normal Force Measurements by Means of Atomic Force Microscopy Towards the Accurate and Easy Spring Constant Determination

Sikora¹

2016

NSNM

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Due to its rapid popularity increase within last three decades, with particular focus on submicrometer quantitative surface's properties imaging, atomic force microscopy (AFM) is still a subject of development and research in terms of both better understanding and efficient utilization of various measurement techniques. Quantitative and comparable measurements at nanoscale are a significant issue, as both: science and industry desire reliable results, allowing to perform repetitive experiments at any time and location. Therefore a numerous analysis and research projects were carried out to provide metrological approach for those techniques in terms of providing the traceability and the uncertainty estimation. In this paper an overview of various methods and approaches towards quantitative determination of the normal spring constant of the AFM probes is presented.

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“…The group in Neuchâtel has shown arrays of 4x4 piezoresistive cantilevers with reference resistors beneath each cantilever for thermal drift compensation, for operation in liquids [94] and for life sciences applications [95,96], demonstrating large area quantitative analysis of biological cells in liquid. Rangelow et al have shown arrays of 128 piezoresistive and self-actuated (by means of the bimetal effect) cantilever proximal probes, and the corresponding measurement and control system [97]. They also fabricated a piezoresistive 16-cantilever AFM probe array for space applications [98], which is the core of MIDAS (Micro-Imaging Dust Analysis System), one of the instruments in the orbiter spacecraft of the ESA Rosetta mission, which on 6 August 2014 became the first mission to rendezvous with a comet (67P/Churyumov-Gerasimenko) after a travel of 10 years, and will orbit it until the end of the mission in December 2015.…”

Section: Cantilevers For Scanning Probe Microscopymentioning

confidence: 99%

Piezoresistive cantilevers for nanomechanical sensing

Bausells

2015

Microelectronic Engineering

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Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications

Cited by 43 publications

References 10 publications

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Parallel AFM imaging and force spectroscopy using two‐dimensional probe arrays for applications in cell biology

Quantitative Normal Force Measurements by Means of Atomic Force Microscopy Towards the Accurate and Easy Spring Constant Determination

Piezoresistive cantilevers for nanomechanical sensing

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