Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors

Riedel, Ralf; Toma, Luminita Marilena; Janssen, Enrico; Nuffer, Jürgen; Melz, Tobias; Hanselka, Holger

doi:10.1111/j.1551-2916.2009.03496.x

Cited by 91 publications

(81 citation statements)

References 14 publications

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“…Sglavo et al [8] obtained ceramic laminates of alumina/silicon carbide with an excellent adhesion and higher strength values than SiAlON ceramics obtained from preceramic polymers [12]. Toma et al [7] took the advantage of the reactions involved in the reactive pyrolysis to obtain piezoresistive SiOC-based ceramics reinforced with active aluminum fillers [13].…”

Section: Introductionmentioning

confidence: 98%

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Structure properties relationship in silicon oxycarbide glasses obtained by spark plasma sintering

Tamayo

Rubio

2014

Ceramics International

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Section: Introductionmentioning

confidence: 98%

“…SiC and SiO 2 . We also used a filler with a completely different nature, Al 2 O 3 that is known to react with the silica to form a mullite phase [7,13]. The use of a carbon source, that is a secondary phase contained in the silicon oxycarbides, was avoided because of the many forms of carbon (i.e.…”

Section: Introductionmentioning

confidence: 99%

Structure properties relationship in silicon oxycarbide glasses obtained by spark plasma sintering

Tamayo

Rubio

2014

Ceramics International

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“…Estos materiales presentan unas buenas propiedades mecánicas (3,4,5,6) térmicas (resistencia a la fluencia a elevadas temperaturas) (7,8), resistencia frente a la oxidación (9,10,11,12) estabilidad química a elevadas temperatura o frente al ataque de ácidos y bases (13,14). Recientemente, se han encontrado otras características tales como que presentan un comportamiento viscoelástico a elevada temperatura (15), así como propiedades piezoeléctricas (16).…”

Section: Introductionunclassified

Influencia del tamaño del material híbrido en las características de los oxicarburos de silicio obtenidos

Mazo¹,

Palencia²,

Nistal³

et al. 2012

Bol. Soc. Esp. Ceram. Vidr.

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En este trabajo se ha investigado cómo influye el tamaño de los materiales híbridos del sistema TEOS/PDMS en las características de los vidrios de oxicarburo de silicio obtenidos. Los híbridos en piezas monolíticas (100 mm x 50 mm x 5 mm) fueron triturados (1 mm x 1 mm x 1 mm) o molidos en mortero de ágata o atrición hasta 16 µm o 3 µm, respectivamente. Posteriormente, se pirolizaron a 1100 ºC, obteniéndose los correspondientes vidrios de oxicarburo de silicio (SiOC). En estos SiOC se han encontrado diferencias en función del tamaño del material híbrido, diferencias que han sido estudiadas desde un punto de vista estructural y microestructural. La muestra monolítica presentó un mayor %C en red (34 %) y, a medida que se muele en mortero de ágata, disminuye hasta el 26 %. Sin embargo, para la muestra de atrición se obtiene valores similares a la monolítica (32 %). Esto concuerda con la presencia de la banda de FT-IR situada a 880 cm -1 atribuida a enlaces Si-C debidos a una mayor incorporación de carbono en la red. La fase de carbono libre en la muestra monolítica posee un dominio de 3.44 nm que aumenta hasta 3.66 nm en la de atrición. Este aumento del dominio corresponde al aumento de la grafitización. La morfología del SiOC monolítico corresponde a agregado de partículas esféricas con poros de 12 µm. Estos poros desaparecen en el SiOC de atrición, el cual está formado por partículas irregulares de 3 µm. Palabras clave: Híbrido, tamaño, pirolisis, oxicarburo de silicio, porosidadInfluence of the hybrid material size in silicon oxycarbide materials characteristics.In this work has been investigated the influence of the TEOS/PDMS hybrid size during the pyrolysis process to obtain the related silicon oxycarbide glasses. Hybrids monolithic pieces (100 mm x 50 mm x 5 mm), were crushed (1 mm x 1 mm x 1 mm) and grounded in agate or attrition to 16 and 3 μm, respectively. Then, they were pyrolyzed at 1100 ºC to obtain silicon oxycarbide glasses (SiOC). These materials present structural and microstructural differences. The monolithic sample showed the highest %C into the silica network (34 %), and after grounding in agate mortar decreased to 26 %. However the attrition milled sample reached %C values similar to the monolithic (32 %). This agrees with FT-IR band at 880 cm -1 assigned to Si-C bonds formation and related to higher carbon content into silica network. The carbon free phase displays a domain size of 3.44 nm which increased to 3.66 nm for the attrition milled. This result is due to a higher graphitization degree. The SiOC monolithic sample morphology displays spherical interconnected particles with pores of 12 mm. This morphology disappeared for the SiOC attrition milled sample, formed by irregular particles of 3 µm.

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“…9 Taken all together these features suggest that silicon oxycarbide glasses could be the ideal material for the next generation glass reinforcing fibers. Moreover, silicon oxycarbides also show interesting electrical properties such as semiconductivity and piezoresistivity 10 which could lead to fibers in which the structural features are combined with new functionalities, for example, chemical sensing.…”

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Processing, Mechanical Characterization, and Alkali Resistance of SiliconBoronOxycarbide (SiBOC) Glass Fibers

et al. 2014

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A borosilicate sol-gel solution is synthesized using a mixture of methyltriethoxysilane, dimethyldiethoxysilane, and boric acid. SiBOC gel fibers are produced from the as-synthesized sol-gel solution using a spinning apparatus. Subsequently, SiBOC glass fibers are prepared through pyrolysis under argon atmosphere at 1000°C and 1200°C. Mechanical properties of the SiBOC glass fibers are studied by measuring the tensile strength and the elastic modulus. The results show a high tensile strength -1300 and 1058 MPa, and a high Young modulus -79 and 95.5 GPa, for the fibers prepared at 1000°C and 1200°C, respectively. Furthermore, alkali resistance of the SiB-OC fibers is investigated by measuring the tensile strength after soaking them for 20 h in NaOH and Ca(OH) 2 solutions at 100°C. For comparison, the same measurements are performed on commercial AR and E glass fibers. The SiBOC fibers show excellent alkaline resistance and perform better than commercial AR fibers. Indeed, SiBOC fibers retain 80%-90% of the initial strength after Ca(OH) 2 attack.

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Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors

Cited by 91 publications

References 14 publications

Structure properties relationship in silicon oxycarbide glasses obtained by spark plasma sintering

Structure properties relationship in silicon oxycarbide glasses obtained by spark plasma sintering

Influencia del tamaño del material híbrido en las características de los oxicarburos de silicio obtenidos

Processing, Mechanical Characterization, and Alkali Resistance of SiliconBoronOxycarbide (SiBOC) Glass Fibers

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