Pixel-scale miniaturization of guided mode resonance transmission filters in short wave infrared

Abstract

The effects of miniaturization on theoretically predicted performance of dual-period guided mode resonance (GMR) transmission filters, which demonstrate immense potential for multispectral imaging in short wave infrared (SWIR), have been compared with experimental findings. With reducing filter size from 112 periods (90 µm) to 12 periods (10 µm), peak transmittance (Tpeak) of simulated and measured filters reduced gradually from 84% to 55% and from 76% to 65%, respectively, with a moderate change of 1 - 3 nm in full width at half maximum (FWHM). For 6 period filters (5 µm), simulations predict drastically reduced Tpeak = 14% accompanied by increase in FWHM by 12 nm. The Tpeak value is theoretically shown to increase to 46% with FWHM reduced by 7 nm upon placing metal reflectors at the optimum positions to increase the optical path length. Our findings indicate that four 5 µm × 5 µm size filters with metal reflectors designed for different resonance wavelengths can be used to form a single, 20 µm × 20 µm mosaic pixel for SWIR multispectral imaging.

Electrical arc discharge in air between Pt-coated NEMS electrodes at nanoscale separation

“…anode and cathode), the sample was rotated during the sputtering process. More details on the device fabrication can be found elsewhere [5,13]. The sidewall roughness (rms) was estimated from SEM images (figure 1(a)) as ∼10 nm.…”