Planar Copper Plating and Electropolishing Techniques

Uzoh, Cyprian; Talieh, H.; Wang, T.; Guo, Guey-Chi; Erdemli, Serkan; Cornejo, Mario; Bogart, Jeff; Başol, B.M.

doi:10.1080/00986440500267410

Cited by 10 publications

(10 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…To prevent this unphysical situation, the wall perpendicular components of the velocity vectors of the particles inside wall boundaiy layers were omitted and, thus, they are prevented from penetrating into solid walls. Information about the validation of the particle tracking tool can be found in Basol et al [8].…”

Section: Methodsmentioning

confidence: 99%

“…Depending on the clocking position of the circular hot streak relative to the stator, a considerable change in the position and shape of the hot streak downstream of the stator was observed. The spanwise migration pattern of a circular hot streak inside the stator with axisymmetric endwalls was studied in a previous numerical work [8], revealing the effect of the aerodynamics of the first stage stator on the hot-streak migration pattern through the stage. It was shown that due to the opposite spanwise migration patterns on either side of the stator, the circumferential temperature gradients at the combustor outlet affect the spanwise heat load distribution on the downstream rows.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Integrated Combustor Turbine Design for Improved Aerothermal Performance: Effect of Dilution Air Control

Basol

Regina

Kalfas

et al. 2012

Journal of Engineering for Gas Turbines and Power

View full text Add to dashboard Cite

The effect of dilution air control in a combustor on the heat load distribution of an axial turbine with nonaxisymmetric endwall profiling is examined. Endwall profiling is a more common design feature in new engine types, due to its effectiveness in reducing secondary fiows and their associated losses. In the present work, the effect of dilution air control is examined by using two different circumferentially nonuniform hot-streak shapes; the two cases differ in their spanwise extents either side of the stator and, therefore, represent different approaches for dilution air control. This numerical study details the impact of these two different strategies for dilution air control on the rotor blade heat load distribution. The inlet boundary conditions simulate the experiment that is conducted in the axial research turbine facility LISA at ETH Zurich. A circumferential nonuniformity in the spanwise migration pattern of the hot streak inside the stator is observed that is found to be alleviated by the effect of the endwall profiling. Due to the observed spanwise migration pattern inside the stator the two hot-streak cases result in considerably different heat toad distributions on the rotor blade, emphasizing the importance of the integrated combustor turbine approach. Finally, the implications for dilution air control on the liner are discussed for the realization of the simulated hot-streak shapes in real combustors.

show abstract

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Integrated Combustor Turbine Design for Improved Aerothermal Performance: Effect of Dilution Air Control

Basol

Regina

Kalfas

et al. 2012

Journal of Engineering for Gas Turbines and Power

View full text Add to dashboard Cite

show abstract

“…Numerous attempts have been made to meet the new Cu planarization requirements due to the use of fragile ultra-low-к materials in the near future. Most of them are focused on slurries [ 7 - 11 ] and the derivative technologies of CMP such as electrochemical mechanical planarization [ 12 - 15 ] and electrochemical mechanical deposition [ 16 - 18 ]. As we know, the polishing pad is one of the most important consumables and plays a critical role in CMP.…”

Section: Introductionmentioning

confidence: 99%

A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-к materials

Han

Liu

2012

Nanoscale Res Lett

View full text Add to dashboard Cite

A new idea of polishing pad called flexible nanobrush pad (FNP) has been proposed for the low down pressure chemical mechanical planarization (CMP) process of Cu/ultra-low-к materials. The FNP was designed with a surface layer of flexible brush-like nanofibers which can ‘actively’ carry nanoscale abrasives in slurry independent of the down pressure. Better planarization performances including high material removal rate, good planarization, good polishing uniformity, and low defectivity are expected in the CMP process under the low down pressure with such kind of pad. The FNP can be made by template-assisted replication or template-based synthesis methods, which will be driven by the development of the preparation technologies for ordered nanostructure arrays. The present work would potentially provide a new solution for the Cu/ultra-low-к CMP process.

show abstract

“…Η χημική απόθεση χαλκού χρησιμοποιείται κυρίως για τη διασύνδεση διαφόρων στρωμάτων των τυπωμένων κυκλωμάτων μέσω της επιχάλκωσης των οπών του (through-hole plating stage) (13,34,35,36) . Με την κλασική μέθοδο, περίπου 0.0000150 -0.000020 in χαλκού αποτίθενται χημικά (electroless plating) στις οπές και αυτή η επιχάλκωση επιτρέπει και τη μετέπειτα ηλεκτροχημική απόθεση χαλκού.…”

Section: επιχάλκωση οπώνunclassified

“…• (35) από την εταιρία ΙΝΤΡΑΚΟΜ Τα πρώτα δύο είδη χρησιμοποιήθηκαν για τη μελέτη της επιχάλκωσης επιφανειών. Τα δοκίμια PCB χρησιμοποιήθηκαν ώστε να μπορέσουμε να διαπιστώσουμε αν η διαδικασία επιχάλκωσης με τη βοήθεια της πολυπυρρόλης επιτρέπει την επιχάλκωση οπών πολυστρωματικών τυπωμένων κυκλωμάτων βιομηχανικών προδιαγραφών.…”

Section: μέθοδος εμβάπτισηςunclassified

Αγώγιμα Πολυμερή Της Πυρρόλης

Κάκος¹

View full text Add to dashboard Cite

Στο πλαίσιο της παρούσας διδακτορικής διατριβής μελετήθηκαν τα αγώγιμα πολυμερή της πυρρόλης για εφαρμογές προηγμένης τεχνολογίας όπως π.χ. στην μετατροπή επιφανειών. Αναπτύχθηκε μέθοδος μετατροπής μη αγώγιμων επιφανειών σε αγώγιμες (επιμετάλλωση μονωτών) με χρήση πολυπυρρόλης. Εν συνεχεία η μέθοδος μελετήθηκε ώστε να εφαρμοστεί στη βιομηχανία των Τυπωμένων Κυκλωμάτων κατά το στάδιο της επιχάλκωσης οπών (PTH – Plating Through Hole). Η μελέτη περιλάμβανε τη σύνθεση της πολυπυρρόλης, την ανάπτυξη μεθόδων απόθεσης μετάλλων σε μονωτές και την ανάλυση των χημικών μηχανισμών της ηλεκτροχημικής απόθεσης χαλκού (copper electrodeposition) στην τροποποιημένη με πολυπυρρόλη επιφάνεια με τελικό στόχο την ανάπτυξη νέων μεθόδων για την επιμετάλλωση μονωτών και την κατασκευή τυπωμένων κυκλωμάτων. Η καινοτόμος σύνθεση πολυπυρρόλης βασίστηκε στον in situ χημικό πολυμερισμό της πυρρόλης. Το τελικό πολυμερές που παράχθηκε εμφάνιζε ιδιότητες οι οποίες αποδείχθηκαν κατάλληλες για μετατροπές μονωτικών υποστρωμάτων αλλά και σε βιομηχανικές εφαρμογές Τυπωμένων Κυκλωμάτων (PCBs).

show abstract

Planar Copper Plating and Electropolishing Techniques

Cited by 10 publications

References 5 publications

Integrated Combustor Turbine Design for Improved Aerothermal Performance: Effect of Dilution Air Control

Integrated Combustor Turbine Design for Improved Aerothermal Performance: Effect of Dilution Air Control

A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-к materials

Αγώγιμα Πολυμερή Της Πυρρόλης

Contact Info

Product

Resources

About