Planar laser-micro machined bulk PZT bimorph For in-plane actuation

Nadig, Sachin; Ardanuç, Serhan; Lal, Amit

doi:10.1109/isaf.2013.6748750

Cited by 15 publications

(3 citation statements)

References 5 publications

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“…Our gyroscope utilizes lateral bimorph [1] shown in Figure 1 as its fundamental building block for drive and sense of the proof mass motion. The device layout is shown in Figure 2(a).…”

Section: Designmentioning

confidence: 99%

“…Laser micromachining involves precision removal of PZT and/or electrode material [1], by repeated and selective scanning of a 355nm UV laser (LPKF ProtoLaser U) without any lithographic mask or chemical etching process. The scan speeds are optimized for through cut of PZT and/or metal without depoling piezoelectric regions that are part of the device.…”

Section: Fabricationmentioning

confidence: 99%

“…Our high aspect ratio bulk-PZT laser micromachining process [1] enables us to fabricate a PZT gyroscope that can have high aspect ratio structures enabling stiffer beams corresponding to higher resonance frequencies, leading to better shock tolerance compared to most surface micromachined gyroscopes. Simple and low cost of fabrication are other advantages.…”

Section: Introductionmentioning

confidence: 99%

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Self-calibration compatible Z-axis bulk PZT vibratory gyroscope

Nadig

Ardanuç

Lal

2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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We report a laser micromachined piezoelectric bulk-PZT (Lead Zirconate Titanate) Z-axis Coriolis force gyroscope, which utilizes spring-mass resonances of the inplane PZT bimorphs and a PZT proof-mass. The gyroscope is compatible to be monolithically integrated with a PZT dither stage for in-situ self-calibration. The design exploits the large piezoelectric coefficients and high mass density of bulk-PZT to obtain high sensitivity, even at low resonance quality factors, compared to other piezoelectric gyroscopes. The gyroscope provides high dynamic range owing to elimination of micro-gaps needed in capacitive transduction. The gyroscope has unamplified sensitivity of ~1.3µV/°/sec under mode-mismatched operation, at drive amplitude of 10V p-p , drive resonance of 108.9 kHz, with electromechanical coupling factor k t of ~0.15 and Q of ~100.

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“…Our gyroscope utilizes lateral bimorph [1] shown in Figure 1 as its fundamental building block for drive and sense of the proof mass motion. The device layout is shown in Figure 2(a).…”

Section: Designmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Self-calibration compatible Z-axis bulk PZT vibratory gyroscope

Nadig

Ardanuç

Lal

2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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Omnidirectional low frequency energy harvester for wearable applications

Pinrod

Davaji

et al. 2019

J. Phys.: Conf. Ser.

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We present an omnidirectional energy harvester with lowest resonance mode at 14.85 Hz. The geometry is designed as a spiral shaped, 500 μm thick PZT lateral bimorph to achieve a low resonance frequency while minimizing the area required. The resonance modes and frequencies of the energy harvester are investigated with COMSOL eigenfrequency study. The resonance modes of translation in x, y, z, and rotation around x, y, and z have resonance frequencies at 23.4, 22.9, 14.9, 34.0, 33.6, and 25.5 Hz, respectively. Multiple resonance modes widen bandwidth and enable harvesting energy from all directions. The energy harvester is mounted inside a 3D printed package that can be worn on a human wrist. The design of the package mimics the approximate size of a typical smartwatch, and the motion from walking is along the most sensitive axes of the harvester. It produces an output of 900 mV peak-to-peak for an optimum load of 1.8 megaohms and provided 0.45 microwatts. The output voltage is high enough to charge a battery through commercial diodes.

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