Planar reflection grating lens for compact spectroscopic imaging system

Ura, Shogo; Okayama, Fumikazu; Shiroshita, Koichi; Nishio, K.; Sasaki, Takahiro; Nishihara, Hiroshi; Yotsuya, Tsutomu; Okano, Masato; Satoh, Kazuo

doi:10.1364/ao.42.000175

Cited by 24 publications

(14 citation statements)

References 10 publications

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“…The very attractive approach to the design of a compact spectrometer is to use MEMS technologies for the fabrication of spectrometer components, which makes it possible to achieve a small component size, low production cost per item and provides the possibility to integrate several components on the same wafer, thus reducing assembling and alignment work. Various spectrometers fabricated with MEMS technologies were reported in the literature including Fourier Transform Spectrometers [1] and Fabry-Perot tunable spectral filters [2] as well as diffraction grating based spectrometers implemented according to classical principles [3] or in a planar waveguide [4]. In practice it is difficult to obtain spectral resolution below 1 nm over a wide wavelength range with the compact device.…”

Section: Introductionmentioning

confidence: 99%

Concave diffraction gratings fabricated with planar lithography

Grabarnik

Emadi

et al. 2008

Micro-Optics 2008

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This paper reports on the development and validation of a new technology for the fabrication of variable line-spacing non-planar diffraction gratings to be used in compact spectrometers. The technique is based on the standard lithographic process commonly used for pattern transfer onto a flat substrate. The essence of the technology presented here is the lithographic fabrication of a planar grating structure on top of a flexible membrane on a glass or silicon wafer and the subsequent deformation of the membrane using a master shape. For the validation of the proposed technology we fabricated several reflection concave diffraction gratings with the f-numbers varying from 2 to 3.8 and a diameter in the 4 -7 mm range. A glass wafer with circular holes was laminated by dry-film resist to form the membranes. Subsequently, standard planar lithography was applied to the top part of the membranes for realizing grating structures. Finally the membranes were deformed using plano-convex lenses in such a way that precise lens alignment is not required. A permanent non-planar structure remains after curing. The imaging properties of the fabricated gratings were tested in a three-component spectrograph setup in which the cleaved tip of an optical fiber served as an input slit and a CCD camera was used as a detector. This simple spectrograph demonstrated subnanometer spectral resolution in the 580 -720 nm range.

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Section: Introductionmentioning

confidence: 99%

Concave diffraction gratings fabricated with planar lithography

Grabarnik

Emadi

et al. 2008

Micro-Optics 2008

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“…In the central part of the operating bandwidth (in the range from 635 nm to 665 nm), the resolution is about 3 nm. The theoretical simulation and optimization of the design parameters do predict the feasibility of a miniature device with the volume more than an order of magnitude smaller than state-of-the-art reported in the literature [5][6][7][8]. Moreover, the reduced volume is not at the expense of inferior optical performance.…”

Section: Planar Spectrometer Designmentioning

confidence: 83%

“…Imaging gratings have already been implemented in waveguide-based systems and in compact classical types of spectrometers [4][5][6][7][8]. The reported devices have a volume typically in the 1 cm 3 range with a 5 nm resolution over a 100 nm spectral range.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

Grabarnik¹,

Emadi²,

Wu³

et al. 2008

J. Micromech. Microeng.

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The design, fabrication and performance of a highly miniaturized optical spectrometer are described. The volume of the opto-electronic system is only 50 mm 3 . The main components are a planar imaging diffraction grating and a commercially available CCD camera. System integration is based on MEMS technologies on a glass wafer. The imaging grating circumvents the need for collimating optics, while the planar grating design is essential for limiting fabrication complexity and enabling assembly of the optical and electronic parts. The system consists of two glass plates placed in parallel with well-defined spacing and comprises all spectrometer components including slit and diffraction grating. The glass plates were fabricated using a single glass wafer with standard lithography applied. The spectrometer demonstrated a 6 nm FWHM spectral resolution in an operating range from 600 nm to 700 nm.

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“…A 1:6 nm FWHM resolution at a wavelength of 400 nm and a 5:5 nm resolution at 800 nm have been reported. Electron-beam lithography was used in [3] for the fabrication of an imaging diffraction grating employed in a spectrometer as small as 1 cm 3 . The reported spectroscopic device demonstrated a 5 nm resolution within a 100 nm range.…”

Section: Introductionmentioning

confidence: 99%

High-resolution microspectrometer with an aberration-correcting planar grating

Grabarnik

Emadi

et al. 2008

Appl. Opt.

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A concept for a highly miniaturized spectrometer featuring a two-component design is presented. The first component is a planar chip that integrates an input slit and aberration-correcting diffraction grating with an image sensor and is fabricated using microelectromechanical systems (MEMS) technologies. Due to the fabrication in a simple MEMS batch process the essential elements of the spectrometer are automatically aligned, and a low fabrication cost per device can be achieved. The second component is a spherical mirror, which is the only external part. The optimized grating structure compensates for aberrations within the spectrometer operating range, resulting in a diffraction-limited performance of the spectrometer optics. The prototype of the device has been fabricated and characterized. It takes a volume of 0:5 cm 3 and provides a FWHM spectral resolution of 0:7 nm over a 350 nm bandwidth from 420 nm to 770 nm combined with an etendue of 7:4 × 10 −5 mm 2 sr.

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Planar reflection grating lens for compact spectroscopic imaging system

Cited by 24 publications

References 10 publications

Concave diffraction gratings fabricated with planar lithography

Concave diffraction gratings fabricated with planar lithography

Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

High-resolution microspectrometer with an aberration-correcting planar grating

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