2011
DOI: 10.1007/s11664-011-1591-3
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Planar Thermoelectric Microgenerators Based on Silicon Nanowires

Abstract: Silicon nanowires have been implemented in microfabricated structures to develop planar thermoelectric microgenerators (lTEGs) monolithically integrated in silicon to convert heat flow from thermal gradients naturally present in the environment into electrical energy. The compatibility of typical microfabrication technologies and the vapor-liquid-solid (VLS) mechanism employed for silicon nanowire growth has been evaluated. Low-thermal-mass suspended structures have been designed, simulated, and microfabricate… Show more

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Cited by 24 publications
(23 citation statements)
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“…proposed and implemented a novel thermoelectric device concept. Similarly Davila et al 4748. proposed a device concept with horizontally aligned nanowires.…”
Section: Resultsmentioning
confidence: 99%
“…proposed and implemented a novel thermoelectric device concept. Similarly Davila et al 4748. proposed a device concept with horizontally aligned nanowires.…”
Section: Resultsmentioning
confidence: 99%
“…The monolithic integration of silicon nanowires into microfabricated device structures was demonstrated by Dávila et al (Fig. ).…”
Section: Device Concepts For Thermoelectric Heat‐to‐electricity Convementioning
confidence: 99%
“…The trench between heat source and sink is bridged by nanowires grown by a vapor liquid solid technique in the example of Ref. .…”
Section: Device Concepts For Thermoelectric Heat‐to‐electricity Convementioning
confidence: 99%
See 1 more Smart Citation
“…9 In our previous work, the suspended platform was linked to the bulk Si rim by means of bulk Si bridges, in addition to the Si NW arrays, acting as mechanical support and as a holder for the electrical connections. [9][10][11] However, this kind of support severely reduces the platform thermal isolation due to the high thermal conductivity of the bulk Si, limiting the device ability to get a large temperature gradient from a waste heat source. Hence, long bridge supports are needed to develop large thermal gradients and significant device area is wasted giving rise to poor power densities.…”
Section: Design and Fabricationmentioning
confidence: 99%