Plasma and ion beam characterization by non-conventional methods

Kersten, Holger; Wiese, Ruben; Hannemann, M.; Kapitov, A.; Scholze, Frank; Neumann, H.; Hippler, R.

doi:10.1016/j.surfcoat.2005.02.173

Cited by 14 publications

(20 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The sensor has to be calibrated following a rigorous procedure so that it can be used in low pressure plasmas. We have compared the values given by this sensor to the ones obtained using an other technique developed by colleagues from Kiel [17] and we found a very good agreement between both probes. The main advantages of this sensor rely on the fact that it has a very good time response (17 µs [5]) and that it does not need further data treatment, but gives directly the measured values in real time.…”

Section: Discussionmentioning

confidence: 70%

“…Results provided by the literature most often come from calculations based on temperature measurements [13,14]. Among them, calorimetric probes, based on an original idea of Thornton [10], were successfully applied to plasma science [15][16][17][18]. Some sophisticated thermal probes have been developed [19][20][21], such as for example the one designed in the IEAP Kiel, which consists of a thermocouple brazed to a metal plate (substrate dummy).…”

Section: Comparison With Other Heat Flux Probesmentioning

confidence: 99%

“…Some sophisticated thermal probes have been developed [19][20][21], such as for example the one designed in the IEAP Kiel, which consists of a thermocouple brazed to a metal plate (substrate dummy). This probe has been used by Kersten et al to characterize many kinds of low pressure plasmas used for powder generation, space propulsion, PECVD, etc [17,21]. Nevertheless, with this kind of probes, the total energy flux is always estimated a posteriori from thermograms recorded during the heating and cooling steps.…”

Section: Comparison With Other Heat Flux Probesmentioning

confidence: 99%

See 2 more Smart Citations

A Heat Flux Microsensor for Direct Measurements in Plasma Surface Interactions

Dussart¹,

Thomann²,

Nadjib³

2011

Microsensors

View full text Add to dashboard Cite

Section: Discussionmentioning

confidence: 70%

Section: Comparison With Other Heat Flux Probesmentioning

confidence: 99%

Section: Comparison With Other Heat Flux Probesmentioning

confidence: 99%

See 1 more Smart Citation

A Heat Flux Microsensor for Direct Measurements in Plasma Surface Interactions

Dussart¹,

Thomann²,

Nadjib³

2011

Microsensors

View full text Add to dashboard Cite

“…This probe has been used by Kersten et al to characterize many kinds of low pressure plasmas used for powder generation, space propulsion, PECVD etc. [12,14] Another way to determine the energy transfer between plasma and surface is the use of a sensor which is sensitive to the energy flux itself. The Heat Flux Microsensor (HFM) which was firstly explored for plasma diagnostics at GREMI exactly uses this principle [15,16].…”

Section: Introductionmentioning

confidence: 99%

“…For that, they were alternatively placed in well characterized plasma environments, e.g. in ion beam source [12,18] and in asymmetric RF discharge [14]. As we will see in the following, both sensors have drawbacks and advantages.…”

Section: Introductionmentioning

confidence: 99%

On the measurement of energy fluxes in plasmas using a calorimetric probe and a thermopile sensor

Cormier¹,

Stahl²,

Thomann³

et al. 2010

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

Two different diagnostics for the determination of the energy influx in plasma processes were used to characterize an ion beam source and an asymmetric RF discharge. The related energy fluxes were measured in dependence on the ion energy and on the RF power, respectively. The first sensor, called HFM (Heat Flux Microsensor) is a thermopile which allows for direct energy flux measurements. With the second sensor, a calorimetric probe, the energy influx has been calculated from the temporal temperature evolution preliminary registered. Although the working principle of both sensors is different, the obtained results are in good agreement. In the ion beam ( < 1,5keV)) rather high energy influxes are achieved (up to 700mW/cm²), whereas the values measured in the asymmetric RF discharge were lower than 50mW/cm² for discharge powers in the range of 10 to 100 W. The performances and limitations of both sensors are compared and discussed.

show abstract

Broad Beam Ion Sources for Electrostatic Space Propulsion and Surface Modification Processes: From Roots to Present Applications

Neumann¹,

Tartz

Scholze

et al. 2007

Contrib. Plasma Phys.

Self Cite

View full text Add to dashboard Cite

Ion thrusters or broad beam ion sources are widely used in electrostatic space propulsion and in high-end surface modification processes.A short historical review of the roots of electric space propulsion is given. In the following, we introduce the electrostatic ion thrusters and broad beam ion sources based on different plasma excitation principles and describe the similarities as well as the differences briefly. Furthermore, an overview on source plasma and ion beam characterisation methods is presented. Apart from that, a beam profile modelling strategy with the help of numerical trajectory codes as basis for a special grid system design is outlined. This modelling represents the basis for the adaptation of a grid system for required technological demands. Examples of model validation demonstrate their reliability. One of the main challenges in improvement of ion beam technologies is the customisation of the ion beam properties, e.g. the ion current density profile for specific demands. Methods of an ex-situ and in-situ beam profile control will be demonstrated.Examples for the use of ion beam technologies in space and on earth -the RIT-10 rescue mission of ESA's satellite Artemis, the RIT-22 for BepiColombo mission and the deposition of multilayer stacks for EUVL (Extreme Ultra Violet Lithography) mask blank application are provided in order to illustrate the potential of plasma-based ion beam sources.

show abstract

Plasma and ion beam characterization by non-conventional methods

Cited by 14 publications

References 7 publications

A Heat Flux Microsensor for Direct Measurements in Plasma Surface Interactions

A Heat Flux Microsensor for Direct Measurements in Plasma Surface Interactions

On the measurement of energy fluxes in plasmas using a calorimetric probe and a thermopile sensor

Broad Beam Ion Sources for Electrostatic Space Propulsion and Surface Modification Processes: From Roots to Present Applications

Contact Info

Product

Resources

About