Plasma Assisted Chemical Vapour Deposition – Technological Design Of Functional Coatings

Januś, M.; Kyzioł, Karol; Kluska, S.; Konefał-Góral, J.; Małek, A.; Jonas, S.

doi:10.1515/amm-2015-0228

Cited by 26 publications

(7 citation statements)

References 8 publications

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“…The chemical or physical vapor deposition can produce uniform and dense coatings. Moreover, plasma treatment has been used in vapor deposition, which can deposit homogeneous, well-adhesive coatings at lower temperature on different substrates [20,21]. To improve the surface roughness, structure, and mechanical properties of CF, hydrogen and oxygen plasma treatments are applied.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Anti-Oxidation Ability of SiC-SiO2 Coated Carbon Fibers Using Sol-Gel Method

et al. 2018

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The paper proposed a method to improve the anti-oxidation performance of carbon fibers (CF) at high temperature environment by coating silicon dioxide (SiO2) and silicon carbide (SiC). The modified sol-gel method had been used to ensure the proper interface between fibers and coating. We used polydimethylsiloxane and ethyl orthosilicate to make stable emulsion to uniformly disperse SiC nanoparticles. The modified SiO2/SiC coating had been coated on CF successfully. Compared with the untreated CF, the coated fibers started to be oxidized around 900 °C and the residual weight was 57% at 1400 °C. The oxidation mechanism had been discussed. The structure of SiC/SiO2 coated CF had been characterized by scanning electron microscope and X-ray diffraction analysis. Thermal gravimetric analysis was used to test the anti-oxidation ability of CF with different coatings.

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Section: Introductionmentioning

confidence: 99%

Fabrication and Anti-Oxidation Ability of SiC-SiO2 Coated Carbon Fibers Using Sol-Gel Method

et al. 2018

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“…Our team conducted a lot of researches on DLC layers deposited on substrates [56]. The results for the Ti Grade 2 (after plasma processes) obtained from the biological and corrosion tests suggest that titanium with the plasmochemically modified surface did not cause severe cytotoxicity against MG63 cells and improves corrosion properties.…”

Section: Titanium and Aluminum Alloysmentioning

confidence: 99%

“…However, it also has disadvantages, namely, hydrophobicity and low surface free energy, resulting in poor adhesive properties. In order to improve the properties of PEEK, we modified the samples with ion etching and deposited layers a-CN:H/ a-SiCN:H by using RFCVD [56].…”

Section: Polymersmentioning

confidence: 99%

DLC Layers Created Using CVD Techniques and Their Application

Januś¹

2019

Chemical Vapor Deposition for Nanotechnology

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One way to obtain new materials with different properties is to modify existing ones to improve their inadequate properties. Due to the fact that many useful properties of materials, including resistance to wear and corrosion, coefficient of friction and biocompatibility, depend on the state of the surface, modern methods of surface engineering are particularly useful. They include the deposition of layers with a matching chemical composition and structure. In terms of applications, the most suitable seem to be amorphous or nanocrystalline layers containing carbon, nitrogen, silicon and hydrogen. They combine the advantageous properties of silicon carbide SiC and silicon nitride Si 3 N 4 and thus have a strong resistance to oxidation at high temperatures, high modulus of elasticity, low coefficient of friction and wear resistance. However, the silicon carbonitride compound is not thermodynamically stable under normal conditions and therefore must be obtained as a result of unconventional synthesis. One of these methods is chemical vapor deposition (CVD), including the most widely used plasma-assisted chemical vapor deposition (PACVD) techniques. The materials obtained, thanks to these techniques, have found and are still finding wider and wider application in many branches of industry and medicine.

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“…One of the most promising and economically viable ways in which this objective can be achieved is the use of modern engineering methods on the surface properties of materials. One such method, and the most promising, is Plasma-Assisted Chemical Vapor Deposition (PA CVD) [ 29 , 30 , 31 ].…”

Section: Introductionmentioning

confidence: 99%

Plasmochemical Modification of Crofer 22APU for Intermediate-Temperature Solid Oxide Fuel Cell Interconnects Using RF PA CVD Method

et al. 2022

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The results of plasmochemical modification on Crofer 22APU ferritic stainless steel with a SiCxNy:H layer, as well as the impact of these processes on the increase in usability of the steel as intermediate-temperature solid oxide fuel cell (IT-SOFC), interconnects, are presented in this work. The layer was obtained using Radio-Frequency Plasma-Activated Chemical Vapor Deposition (RF PA CVD, 13.56 MHz) with or without the N+ ion modification process of the steel surface. To determine the impact of the surface modification on the steel’s resistance to high-temperature corrosion and on its mechanical properties, the chemical composition, atomic structure, and microstructure were investigated by means of IR spectroscopy, X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS). Microhardness, Young’s modulus, wear rate, as well as electrical resistance, were also determined. Micromechanical experiments showed that the plasmochemical modification has a positive influence on the surface hardness and Young’s modulus of the investigated samples. High-temperature oxidation studies performed for the samples indicate that N+ ion modification prior to the deposition of the SiCxNy:H layer improves the corrosion resistance of Crofer 22APU steel modified via CVD. The area-specific resistance of the studied samples was 0.01 Ω·cm2, which is lower than that of bare steel after 500 h of oxidation at 1073 K. It was demonstrated that the deposition of the SiCxNy:H layer preceded by N+ ion modification yields the best properties.

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Plasma Assisted Chemical Vapour Deposition – Technological Design Of Functional Coatings

Cited by 26 publications

References 8 publications

Fabrication and Anti-Oxidation Ability of SiC-SiO2 Coated Carbon Fibers Using Sol-Gel Method

Fabrication and Anti-Oxidation Ability of SiC-SiO2 Coated Carbon Fibers Using Sol-Gel Method

DLC Layers Created Using CVD Techniques and Their Application

Plasmochemical Modification of Crofer 22APU for Intermediate-Temperature Solid Oxide Fuel Cell Interconnects Using RF PA CVD Method

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