Plasma-Chemical Deposition of Diamond-Like Films onto the Surface of Heavily Doped Single-Crystal Diamond

Охапкин, А. И.; Yunin, P. A.; Дроздов, М. Н.; Korolyov, S. A.; Kraev, S. A.; Arkhipova, Ekaterina A.; Скороходов, Е. В.; Bushuykin, P. A.; Shashkin, V. I.

doi:10.1134/s1063782619090136

Cited by 3 publications

(1 citation statement)

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“…The broad peak in the range of 1000∼1800 cm −1 as seen in Figure 5 is due dominantly to the combined action of D peak and G peak. Generally speaking, D peak around 1360 cm −1 is resulted from the breathing modes of sp2 atoms in clusters of sixfold aromatic ring, while G peak around 1530 cm −1 is induced by the in-plane bond-stretching motion of pairs of carbon sp2 atom [17,18]. Therefore, the Raman spectroscopy of each film sample was deconvoluted into two Gaussian peaks.…”

Section: Resultsmentioning

confidence: 99%

Optical properties of diamond-like carbon films prepared by pulsed laser deposition onto 3D surface substrate

Huang

Wang

et al. 2020

Surface Engineering

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It is difficult to grow uniform film by pulsed laser deposition because the spatial distribution of the laser-induced plume is a forward-directed cone-shape. A 3D-motional deposition setup was founded, and the correlative mathematical model of the film thickness on the 3D curved surface was deduced. Based on simulation and optimization, the diamond-like carbon (DLC) film was grown onto the large curved silicon substrate. According to the infrared transmittance spectra, the optical constants of the DLC film samples at different regions on the curved substrate were similar, indicating that the DLC film prepared onto the curved surface was homogeneous. Meanwhile, the deviation of average transmittance in the medium infrared band was below 2.3%, which could improve the imaging performance of the infrared detection. This research is useful to expand the application of the pulsed laser deposition in the optical field.

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Section: Resultsmentioning

confidence: 99%