2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC) 2015
DOI: 10.1109/pvsc.2015.7356326
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Plasma damage effect on ultraviolet-induced degradation of PECVD SiNx:H passivation

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Cited by 10 publications
(11 citation statements)
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“…Several studies showed that the silicon nitride passivation by a‐SiN x :H (abbreviated SiN in this work) degrades under UV irradiation . However, the effect was investigated only with non‐fired samples.…”
Section: Introductionmentioning
confidence: 98%
“…Several studies showed that the silicon nitride passivation by a‐SiN x :H (abbreviated SiN in this work) degrades under UV irradiation . However, the effect was investigated only with non‐fired samples.…”
Section: Introductionmentioning
confidence: 98%
“…To avoid carrier recombination at defects and improve minority carrier lifetimes, the cell surfaces are generally passivated using dielectric layers, such as hydrogenated silicon nitride (Si x N y :H) and/or silicon dioxide (SiO 2 ). However, UV exposure can disrupt this surface passivation by damaging the passivation layer itself or the passivation layer/Si cell interface 11–14 as well as causing subsurface damage in the silicon 15,16 . Different research groups have identified distinct wavelengths in the 300–400 nm spectral range as the damaging wavelengths of incident radiation for UV degradation of Si solar cells 13,14,17–24 …”
Section: Introductionmentioning
confidence: 99%
“…One explanation for the vulnerability of Si x N y passivation arises from the deposition processes of Si x N y films. Transmission electron microscopy (TEM) examination revealed that during plasma‐enhanced chemical vapor deposition (PECVD), a damaged layer of around 50 nm is formed at the c‐Si side of Si x N y /Si interface, which is passivated with H atoms 15 . However, the recombination velocity at this region is increased by the UV irradiation, resulting in a decrease in carrier lifetime.…”
Section: Introductionmentioning
confidence: 99%
“…Cells with an amorphous silicon nitride a‐SiN y :H (abbreviated SiN in this work) passivation layer on a n + ‐type emitter were reported to suffer from UV induced degradation due to an increase in the density of states D it . Several references showed that thermal treatment and UV light changes the fixed charge Q f and decreases the surface passivation.…”
Section: Introductionmentioning
confidence: 96%