Plasma diagnostics for surface modification of polymers

Meichsner, Jürgen; Zeuner, Michael; Krames, B.; Nitschke, Mirko; Rochotzki, R.; Barucki, K.

doi:10.1016/s0257-8972(97)00298-3

Cited by 45 publications

(36 citation statements)

References 11 publications

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“…This effect is responsible for the decrease in the contact angle that occurs at much lower microwave power/ treatment time than the argon treated polystyrene surface. Meichsner et al observed bands at (3500cm -1 to 3000cm -1 ) and various C-O bands (1300cm -1 -1000cm -1 ), which are similar to our observations [16]. In figure 4 (polyethylene treated with oxygen), the band around 3500cm -1 is due to the (-OH) group and the broadening could be due to its intermolecular or intramolecular reactions.…”

Section: Ftir-atr Analysissupporting

confidence: 91%

Plasma surface modification of polystyrene and polyethylene

Guruvenket

Rao

Komath

et al. 2004

Applied Surface Science

312

215

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Polystyrene (PS) and polyethylene (PE) samples were treated with argon and oxygen plasmas. Microwave Electron Cyclotron Resonance (ECR) was used to generate the argon and oxygen plasmas and these plasmas were used to modify the surface of the polymers. The samples were processed at different microwave powers and treatment time and the surface modification of the polymer was evaluated by measuring the water contact angle of the samples before and after the modification. Decrease in the contact angle was observed with the increase in the microwave power for both polystyrene and polyethylene. Plasma parameters were assessed using Langmuir probe measurements.Fourier transform infrared spectroscopy showed the evidence for the induction of oxygen based functional groups in both polyethylene and polystyrene when treated with the oxygen plasma. Argon treatment of the polymers showed improvement in the wettability which is attributed to the process called as CASING, on the other hand the oxygen plasma treatment of the polymers showed surface functionalization. Correlation between the plasma parameters and the surface modification of the polymer is also discussed * Corresponding author: gmrao@isu.iisc.ernet.in

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Section: Ftir-atr Analysissupporting

confidence: 91%

Plasma surface modification of polystyrene and polyethylene

Guruvenket

Rao

Komath

et al. 2004

Applied Surface Science

312

215

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“…This has been our motivation of conducting a combined experimental, numerical and analytical investigation of CCRF discharges in pure oxygen. Oxygen discharges, being one of the simplest electronegative plasma system, provide an interesting scenario for theoretical modeling (see for example [41][42][43][44][45][46][47][48][49][50]52] and references therein) and experimental diagnostics [49,50,[52][53][54][55][56][57] of electronegative plasmas. In contrast to the previous work of the EAE in oxygen discharges with only numerical simulation [36], our complementary approach here certainly promises a more comprehensive description of the discharge properties.…”

Section: Introductionmentioning

confidence: 99%

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Schüngel¹,

Zhang²,

Iwashita³

et al. 2011

J. Phys. D: Appl. Phys.

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To cite this version:E Schüngel, Q-Z Zhang, S Iwashita, J Schulze, L-J Hou, et al.. Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect. Journal of Physics D: Applied Physics, IOP Publishing, 2011, 44 (28) Abstract. By using a combined experimental, numerical and analytical approach, we investigate the control of plasma properties via the Electrical Asymmetry Effect (EAE) in a capacitively coupled oxygen discharge. In particular, we present the first experimental investigation of the EAE in electronegative discharges. A dual-frequency voltage source of 13.56 MHz and 27.12 MHz is applied to the powered electrode and the discharge symmetry is controlled by adjusting the phase angle θ between the two harmonics. It is found that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on θ, while the peak densities and the electronegativity stay rather constant, largely due to the fact that the time averaged power absorption by electrons is almost independent of θ. This indicates that the ion flux towards the powered electrode remains almost constant. Meanwhile, the dc self-bias and, consequently, the sheath widths and potential profile can be effectively tuned by varying θ. This enables a flexible control of the ion bombarding energy at the electrode. Therefore, our work proves the effectiveness of the EAE to realize separate control of ion flux and ion energy in electronegative discharges. At low pressure, the strength of resonance oscillations, which are found in the current of asymmetric discharges, can be controlled with θ.

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“…Most notably O 2 , either as the main feedstock gas or as an admixture to halogen-or silicon-based gases, is of vital importance for a large variety of etching and thin-film deposition techniques [1,2,3,4,5,6,7]. The requirements on the controllability and predictability of these processes are so high that further advancement of this technology will depend on modeling tools which go beyond the macroscopic, fluid-type approximations, which, for instance, cannot reliably predict the velocity distributions of the species.…”

Section: Introductionmentioning

confidence: 99%

Radio-frequency discharges in oxygen: I. Particle-based modelling

Bronold

Matyash

Tskhakaya

et al. 2007

J. Phys. D: Appl. Phys.

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In this series of three papers we present results from a combined experimental and theoretical, particle-based study to quantitatively describe capacitively coupled radio-frequency discharges in oxygen. The particle-in-cell Monte Carlo model on which the theoretical description is based is described in this paper. It treats space charge fields and transport processes on an equal footing with the most important plasma–chemical reactions. For given external voltage and pressure, the model determines the electric potential within the discharge and the distribution functions for electrons, negatively charged atomic oxygen and positively charged molecular oxygen. Previously used scattering and reaction cross section data are critically assessed and in some cases modified. To validate our model, we compare the densities in the bulk of the discharge with experimental data and find good agreement, indicating that essential aspects of an oxygen discharge are captured.

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Plasma diagnostics for surface modification of polymers

Cited by 45 publications

References 11 publications

Plasma surface modification of polystyrene and polyethylene

Plasma surface modification of polystyrene and polyethylene

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Radio-frequency discharges in oxygen: I. Particle-based modelling

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