Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate

Fan, Qipeng; Sang, Lixia; Jiang, Derong; Yang, L.; Chen, Qiang; Liu, Zhongwei

doi:10.1116/1.5062842

Cited by 20 publications

(19 citation statements)

References 43 publications

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“…Among these, the Co 16 N 2 phase is being Electronic supplementary material The online version of this article (https ://doi.org/10.1007/s4245 2-019-1808-2) contains supplementary material, which is available to authorized users. explored recently [24], Co 2 N and Co 3 N have been studied by several co-workers [25][26][27][28][29]. The N-rich CoN 2 phase was recently synthesized under high pressure high temperature (30 GPa, 1600 K) [30].…”

Section: Introductionmentioning

confidence: 99%

X-ray absorption spectroscopy study of cobalt mononitride thin films

et al. 2019

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We present a comprehensive study to resolve the debate about the structure of cobalt mononitride (CoN). In contradiction with theoretical predictions, experimentally CoN has been claimed to synthesize in a rock-salt (RS) and in a zincblende (ZB)-type structure under ambient pressure and temperature. Utilizing X-ray absorption near-edge spectroscopy (XANES) at Co and N K-edges and extended X-ray absorption fine structure (EXAFS) at Co K-edge, we investigated the structure of CoN in detail. The presence of a strong pre-edge feature at the Co K-edge and the absence of t 2 feature at the N K-edge indicate towards the tetrahedral coordination that is expected in the ZB-type structure of CoN. Theoretical simulations of XANES spectra unambiguously confirm the ZB-type structure in CoN. Also from EXAFS data, we found that CoN and Co-Co bond distances match well with ZB-CoN. Magnetic properties of CoN were examined using polarized neutron reflectivity and bulk magnetization measurements. It was found that CoN sample exhibits a paramagnetic behaviour as expected in ZB-CoN. Obtained results clearly demonstrate that CoN indeed crystalizes in the ZB-type structure, and the possibility of the RS-type CoN can be ruled out under ambient pressure and temperature. It is anticipated that the information about the structure of CoN can be utilized for its usage in emerging areas such as low-cost catalyst in oxygen and hydrogen evaluation reactions, high capacity anode in ion batteries and in photovoltaic applications.

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Section: Introductionmentioning

confidence: 99%

X-ray absorption spectroscopy study of cobalt mononitride thin films

et al. 2019

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“…5. The distinct features of these spectra are Co-Co (778.2 eV), Co-N (780.6 eV) in both Co 2p 3/2 and 2p 1/2 regions due to spin-orbit splitting 20,38,40,41 . The presence of dominant Co-N binding feature at 300 K again confirms Co 4 N phase formation and the oxidation state of Co for Co 4 N between +2 and +3 41 .…”

Section: Resultsmentioning

confidence: 99%

“…4 (d)). The main feature for 373 K annealed sample is Co-N bonding (398 eV) [37][38][39] and some N-O bonding (400 eV). For sample annealed at 573 K, the intensity of N 1s spectra is quite low as compared to others.…”

Section: Resultsmentioning

confidence: 99%

Synthesis and study of fcc-Co derived from isostructural Co4N

Kumar,

Deshpande,

Gupta

2021

Preprint

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This work demonstrates synthesis and study of fcc-Co derived from an isostructural Co 4 N. Diffusion measurements carried out in this work, reveal that N self-diffusion is the swiftest in Co 4 N compared to other transition metal nitrides or even the mononitride CoN. By the application of a high substrate temperature (T s ) growth or thermal annealing temperature (T a ); N diffuses out from the fcc-Co 4 N above 573 K leaving behind a high purity fcc-Co phase. Generally, Co grows in a hcp structure and a (partial) hcp→fcc-Co transformation takes place around 700 K or above 70 GPa. The proposed route through nitridation and diffusion of N not only bring down the phase transition temperature, an impurity present in the form of hcp-Co can be avoided altogether. Oriented Co 4 N(111) thin films were grown using a CrN(111) template on a quartz substrate using a dc magnetron sputtering. Samples were grown at different T s or room temperature grown Co 4 N samples were annealed at different T a . Analysis using x-ray diffraction, N K-edge x-ray absorption, x-ray photoelectron and secondary ion mass spectroscopy confirmed the formation of fcc-Co 4 N or fcc-Co phases. It was found that Co-N bonding and N concentration get significantly reduced at a high T s or T a . Magnetization measurements combining ex-situ and in-situ magneto-optical Kerr effect showed differences in anisotropy and coercivity of Co 4 N and fcc-Co samples. Combining structural, electronic and magnetization measurements, it has been observed that a high purity fcc-Co can be conveniently derived from the isostructural Co 4 N aided by an exceptionally high N self-diffusion in Co 4 N.

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“…The monotonic decrease of the resistivity with increasing film thickness can be ascribed to the contributions of the electrons to scatter with grain boundaries, interfaces, and surfaces. Based on a scattering-induced model, which was given in our previous publications [34,35], the electrical resistivity as a function of the reciprocal of the films thickness is shown in Fig. 6(b).…”

Section: Resultsmentioning

confidence: 99%

“…The PEALD setup includes a deposition chamber and a lowpressure dielectric barrier discharge (DBD) apparatus. The details of the chamber have been given in our previous publications [34,35,36]. The deposition chamber consists of a 60-cm-long fused silica tube (id 50 mm) and a half-cylinder aluminum rod placed along the axis of the outer tube as the sample holder.…”

Section: Methodsmentioning

confidence: 99%