2022
DOI: 10.1039/d1dt03417k
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Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries

Abstract: A plasma-enhanced ALD process has been developed to deposit nickel phosphate. The process combines a trimethylphosphate (TMP) plasma with an oxygen plasma and nickelocene at a substrate temperature of 300°C....

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Cited by 5 publications
(7 citation statements)
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“…When a supercycle approach is used in ALD, a lower GPC offers a finer control over the dopant concentration. However, an exceptionally high GPC of 1.1nm per cycle was reported for the FePO process [26], compared to a value of 0.2 nm per cycle for the NiPO process [27]. No significant increase in the film thickness occurred when pulsing times in excess of the given exposure times (table 1) were used, suggesting that the saturation which was present for the indiviual processes still holds.…”
Section: Atomic Layer Deposition Of Ni-and Fe-phosphates and Mixed Ma...mentioning
confidence: 93%
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“…When a supercycle approach is used in ALD, a lower GPC offers a finer control over the dopant concentration. However, an exceptionally high GPC of 1.1nm per cycle was reported for the FePO process [26], compared to a value of 0.2 nm per cycle for the NiPO process [27]. No significant increase in the film thickness occurred when pulsing times in excess of the given exposure times (table 1) were used, suggesting that the saturation which was present for the indiviual processes still holds.…”
Section: Atomic Layer Deposition Of Ni-and Fe-phosphates and Mixed Ma...mentioning
confidence: 93%
“…The used processes were both previously reported by our group. The FePO process was reported by Dobbelaere et al [26] in 2016 and the NiPO process was described by Henderick et al [27] in 2022. Both of the ALD-sequences are constructed similarly: a TMP plasma (TMP * ) pulse is followed by a O 2 * pulse and finally the metalorganic precursor (NiCp 2 or TBF) is pulsed with argon carrier gas.…”
Section: Atomic Layer Deposition Of Ni-and Fe-phosphates and Mixed Ma...mentioning
confidence: 94%
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“…Users only need to drag and drop the model modules provided in the platform and then combine and connect the existing basic modules according to the user's own modeling and simulation tasks [29]. Then, after a simple interactive operation in the software, the drag-and-drop model can be simulated according to the user's imagination.…”
Section: Application Of Intelligent Space Simulation Technology In Ce...mentioning
confidence: 99%
“…In that respect, transition metal phosphates were proposed due to their environmental benignity, cost-efficiency, and high thermal and structural stability rendering the electrodes with superior safety and cycling stability. Among them, nickel phosphate with its various structures has evoked a lot of interest. Different approaches for the synthesis of crystalline nickel phosphate octahydrate (Ni 3 (PO 4 ) 2 ·8H 2 O) have been reported, from a hydrothermal process, simple reflux method to microwave-assisted route . The latter was tested as a supercapattery electrode delivering a specific capacity of up to 520.4 C g –1 at a current density of 2 A g –1 .…”
Section: Introductionmentioning
confidence: 99%