Plasma enhanced chemical vapor deposition of low dielectric constant SiCFO thin films

Kim, T.H; Im, Yeon-Ho; Hahn, Yoon Bong

doi:10.1016/s0009-2614(02)01715-3

Cited by 7 publications

(4 citation statements)

References 12 publications

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“…The vibration bands at 1,040/cm were reported for the stretching of the SO 3 group and 1,377/cm for the O=S=O stretching in the SO 3 H group [18,32]. Although the peak from 1,100 to 1,200/cm is assigned to the C-F bond, it is overlapped by the peak of the Si-O bond [33,34]. The bands between 1,020 and 1,220/cm were reported as the peaks associated to the CF, CF 2 , and CF 3 bonds [35].…”

Section: Resultsmentioning

confidence: 99%

Cellobiose hydrolysis using acid-functionalized nanoparticles

Peña

Ikenberry

Ware

et al. 2011

Biotechnol Bioproc E

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Mineral acids have been used effectively for the pretreatment of cellulosic biomass to improve sugar recovery and promote its conversion to ethanol; however, substantial capital investment is required to enable separation of the acid, and corrosion-resistant materials are necessary. Disposal and neutralization costs are also concerns because they can decrease the economic feasibility of the process. In this work, three acid-functionalized nanoparticles were synthesized for pretreatment and hydrolysis of lignocellulosic biomass. Silica-protected cobalt spinel ferrite nanoparticles were functionalized with perfluoroalkylsulfonic acid (PFS), alkylsulfonic acid (AS), and butylcarboxylic acid (BCOOH) groups. These nanoparticles were magnetically separated from the reaction media and reused. TEM images showed that the average diameter was 2 nm for both PFS and BCOOH nanoparticles and 7 nm for AS nanoparticles. FTIR confirmed the presence of sulfonic and carboxylic acid functional groups. Ion exchange titration measurements yielded 0.9, 1.7, and 0.2 mmol H + /g of catalyst for PFS, AS, and BCOOH nanoparticles, respectively. Elemental analysis results indicated that PFS and AS nanoparticles had 3.1 and 4.9% sulfur, respectively. Cellobiose hydrolysis was used as a model reaction to evaluate the performance of acid-functionalized magnetic nanoparticles for breaking β-(1→4) glycosidic bonds. Cellobiose conversion of 78% was achieved when using AS nanoparticles as the catalyst at 175°C for 1 h, which was significantly higher than the conversion for the control experiment (52%). AS nanoparticles retained more than 60% of their sulfonic acids groups after the first run, and 65 and 60% conversions were obtained for the second and third runs, respectively.

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Section: Resultsmentioning

confidence: 99%

Cellobiose hydrolysis using acid-functionalized nanoparticles

Peña

Ikenberry

Ware

et al. 2011

Biotechnol Bioproc E

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“…The peaks at 1425 cm -1 in the spectra of AS and PFS nanoparticles have been attributed to undissociated SO 3 H groups [48,50]. The peaks at 1080, 1150, and 1190 cm -1 in the spectrum of PFS nanoparticles have been assigned to the C-F bond [52][53][54]. The results from FTIR analysis showed that all of the nanoparticles had the functional groups expected.…”

Section: Characterization Of Acid-functionalized Nanoparticlesmentioning

confidence: 91%

Acid-Functionalized Nanoparticles for Pretreatment of Wheat Straw

Wang¹,

Ikenberry²,

Peña³

et al. 2012

JBNB

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Perfluoroalkylsufonic (PFS) and alkylsufonic (AS) acid-functionalized magnetic nanoparticles were synthesized and characterized, then evaluated for their ability to hydrolyze hemicelluloses. The magnetic core was made of cobalt spinel ferrite and was coated with silica to protect it from oxidation. The silanol groups allowed surface chemical modification of the nanoparticles with the PFS and AS acid functionalities. Thermogravimetric analysis gave a total organic load of 12.6% and 32.5% (w/w) for AS and PFS nanoparticles, respectively. The surface sulfur content was calculated from XPS analysis as 1.37% and 1.93% for PFS and AS nanoparticles, respectively. Wheat straw samples were treated with the acid-functionalized nanoparticles at two different conditions: 80℃ for 24 h and 160℃ for 2 h. These experiments aimed to hydrolyze wheat straw hemicelluloses to soluble oligosaccharides. PFS nanoparticles solubilized significantly higher amounts of hemicelluloses (24.0% ± 1.1%) than their alkyl-sulfonic counterparts (9.1% ± 1.7%) at 80℃, whereas the hydrothermolysis control solubilized 7.7% ± 0.8% of the original hemicelluloses in the sample. At 160℃, PFS and AS nanoparticles gave significantly higher amounts of oligosaccharides (46.3% ± 0.4% and 45 ± 1.2%, respectively) than the control (35.0% ± 1.8%). The hemicelluloses conversion at 160?C reached 66.3% ± 0.9% using PFS nanoparticles and 61.0% ± 1.2% using AS nanoparticles compared with the control experiment, which solubilized 50.9% ± 1.7% of hemicelluloses in the biomass

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“…For a:C-F, even though k-values as low as 1. 3 have been achieved in the as-deposited state, 9 once the films are annealed, F outgassing not only leads to high shrinkage rates and but also poses difficulties in maintaining a sufficiently low k-value 10 (Table I). In the case of fluorinated DLC with k-values less than 2.5, reactions with SiO 2 , SiN, and TaN at 400 C result in film instability, even after instituting stabilization treatments, due to the formation of Si-F and Ta-F bonds.…”

Section: A Integration Challenges and Desired Properties Of Ultralowmentioning

confidence: 99%

Study and optimization of PECVD films containing fluorine and carbon as ultra low dielectric constant interlayer dielectrics in ULSI devices

Sundaram

Lee

Goeckner

et al. 2015

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Fluorinated amorphous carbon films that are thermally stable at 400 C have been deposited in a plasma enhanced chemical vapor deposition system using tetrafluorocarbon and disilane (5% by volume in helium) as precursors. The bulk dielectric constant (k) of the film has been optimized from 2.0/2.2 to 1.8/1.91 as-deposited and after heat treatment, by varying process parameters including power density, deposition temperature, and wall temperature. Films, failing shrinkage rate requirements, possessing promising k-values have been salvaged by utilizing a novel extended heat treatment scheme. Film properties including chemical bond structure, F/C ratio, refractive index, surface planarity, contact angle, dielectric constant, flatband voltage shift, breakdown field potential and optical energy gap have been evaluated by varying process pressure, power, substrate temperature, and flow rate ratio of processing gases. Both x-ray photoelectron spectroscopy and FTIR results confirm that the stoichiometry of the ultralow k film is close to that of CF 2 with no oxygen. C-V characteristics indicate the presence of negative charges that are either interface trapped charges or bulk charges. Average breakdown field strength was in the range of 2-8 MV/cm while optical energy gap varied between 2.2 and 3.4 eV.

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Plasma enhanced chemical vapor deposition of low dielectric constant SiCFO thin films

Cited by 7 publications

References 12 publications

Cellobiose hydrolysis using acid-functionalized nanoparticles

Cellobiose hydrolysis using acid-functionalized nanoparticles

Acid-Functionalized Nanoparticles for Pretreatment of Wheat Straw

Study and optimization of PECVD films containing fluorine and carbon as ultra low dielectric constant interlayer dielectrics in ULSI devices

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