Plasma-enhanced chemical vapor deposition of carbon films using dibromoadamantane

Shirafuji, Tatsuru; Nishimura, Yoshiyasu; Tachibana, Kunihide; Ishii, Hirotoshi

doi:10.1016/j.tsf.2009.07.170

Cited by 6 publications

(6 citation statements)

References 27 publications

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“…Figure b shows the spectra of the S1, S2, S3, and S4 samples. In the CH stretching region, vCH, (3100–2700 cm −1 ), in agreement with previous results, we observed for S1 and S3 samples, the adamantane characteristic bands at 2930, 2905, and 2850 cm −1 . The strongest intensity is that of the 2906 cm −1 one.…”

Section: Measurements and Resultssupporting

confidence: 93%

“…The predominant absorption features for adamantane in solution, KBr pellets or solid phase, in the CH stretching region are observed at 2950, 2940, 2910, and 2850 cm −1 , with the strongest intensity for that at 2910 cm −1 assigned to v CH mode.…”

Section: Measurements and Resultsmentioning

confidence: 98%

“…The smallest diamondoid, adamantane (C 10 H 16 ), is composed of a single diamond unit cell of

{normalC}_{{s p}^{3}}

with two kinds of carbon at dangling edges, −CH 2 and −CH. The adamantane molecules should produced upon electron impact dissociation, two kinds of precursor, the 1‐adamantyl and 2‐adamantyl radicals formed by removing one hydrogen from −CH and −CH 2 dangling edges, respectively …”

Section: Measurements and Resultsmentioning

confidence: 99%

See 2 more Smart Citations

Hydro‐carbon material design in a capacitively coupled radio‐frequency discharge

Mitic

Coussan

Martin

et al. 2017

Plasma Processes & Polymers

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The synthesis and the growth of carbonaceous microparticles is observed in a capacitively coupled radio‐frequency discharge in controlled adamantane‐acetylene gas mixtures. The plasma is characterized by optical emission spectroscopy and mass spectroscopy while the produced particles were analyzed ex situ using Fourier‐Transform infrared absorption spectroscopy. It is revealed that the adamantane to acetylene ratio controlled the particle material properties, in particular the type of chemical bonds between the constituting polymers. Systematic and consistent changes in plasma parameters when changing the adamantane to acetylene ratio are also reported and are correlated to the evolution of particle material properties.

show abstract

Section: Measurements and Resultssupporting

confidence: 93%

Section: Measurements and Resultsmentioning

confidence: 98%

“…The smallest diamondoid, adamantane (C 10 H 16 ), is composed of a single diamond unit cell of

{normalC}_{{s p}^{3}}

Section: Measurements and Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Hydro‐carbon material design in a capacitively coupled radio‐frequency discharge

Mitic

Coussan

Martin

et al. 2017

Plasma Processes & Polymers

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“…Thus, dielectric properties are augments. Apart from dielectric properties, better adhesive properties are also achieved by virtue of bromine atoms, which promote cross-linking [22].…”

Section: Resultsmentioning

confidence: 99%

Controlled deposition of new organic ultrathin film as a gate dielectric layer for advanced flexible capacitor devices

Meena

Chu

Singh

et al. 2012

J Mater Sci: Mater Electron

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This letter describes a new organic (1-bromoadamantane) ultrathin film as gate dielectric, which was successfully deposited by sol-gel spin-coating process on a flexible polyimide substrate at room temperature. The metal-insulator-metal (MIM) device with organic (1-bromoadamantane) ultrathin (10 nm) film as gate dielectric layer operated at gate voltage of 5.0 V, showing a low leakage current density (5.63 9 10 -10 A cm -2 at 5 V) and good capacitance (2.01 fF lm -2 at 1 MHz). The chemical structure of the 1-bromoadamantane layer was investigated by Fourier transform infrared spectrometer. The excellent leakage current density and better capacitance, probably due to the presence of polar, non-polar, low-polar groups, and bromine atoms in ultrathin film. Practical properties of the film in MIM capacitor such as dielectric constant as well as bending result of leakage current density and breakdown voltage have been better related to such fundamental adhesion nature over flexible substrate. This permits estimation of the properties of new dielectric in thin film form and short lists of the best materials for low loss and good capacitance flexible capacitors could be drawn up in future.

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“…Apart from dielectric properties, better adhesive properties are also achieved by virtue of the bromine atom in 1-bromoadamantane and oxygen atom in P123. [14] Moreover, in the 1-bromoadamantane-P123 NCTF-based MIM capacitor, the P123 molecule has significantly high molecular weight (molecular weight: 5800 g mol À1 ), and consequently, it will not move in the presence of external voltage stressing.…”

Section: à2mentioning

confidence: 99%

Thin‐Film Composite Materials as a Dielectric Layer for Flexible Metal–Insulator–Metal Capacitors

Tiwari

Meena

et al. 2010

ChemSusChem

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A new organic-organic nanoscale composite thin-film (NCTF) dielectric has been synthesized by solution deposition of 1-bromoadamantane and triblock copolymer (Pluronic P123, BASF, EO20-PO70-EO20), in which the precursor solution has been achieved with organic additives. We have used a sol-gel process to make a metal-insulator-metal capacitor (MIM) comprising a nanoscale (10 nm-thick) thin-film on a flexible polyimide (PI) substrate at room temperature. Scanning electron microscope and atomic force microscope revealed that the deposited NCTFs were crack-free, uniform, highly resistant to moisture absorption, and well adhered on the Au-Cr/PI. The electrical properties of 1-bromoadamantane-P123 NCTF were characterized by dielectric constant, capacitance, and leakage current measurements. The 1-bromoadamantane-P123 NCTF on the PI substrate showed a low leakage current density of 5.5 x 10(-11) A cm(-2) and good capacitance of 2.4 fF at 1 MHz. In addition, the calculated dielectric constant of 1-bromoadamantane-P123 NCTF was 1.9, making them suitable candidates for use in future flexible electronic devices as a stable intermetal dielectric. The electrical insulating properties of 1-bromoadamantane-P123 NCTF have been improved due to the optimized dipole moments of the van der Waals interactions.

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Plasma-enhanced chemical vapor deposition of carbon films using dibromoadamantane

Cited by 6 publications

References 27 publications

Hydro‐carbon material design in a capacitively coupled radio‐frequency discharge

Hydro‐carbon material design in a capacitively coupled radio‐frequency discharge

Controlled deposition of new organic ultrathin film as a gate dielectric layer for advanced flexible capacitor devices

Thin‐Film Composite Materials as a Dielectric Layer for Flexible Metal–Insulator–Metal Capacitors

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