2007
DOI: 10.1088/0957-4484/18/50/505307
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Plasma-enhanced chemical vapour deposition growth of Si nanowires with low melting point metal catalysts: an effective alternative to Au-mediated growth

Abstract: Au nanoparticles are efficient catalysts for the vapour-solid-liquid (VLS) growth of semiconductor nanowires, but Au poses fundamental reliability concerns for applications in Si semiconductor technology. In this work we show that the choice of catalysts for Si nanowire growth can be broadened when the need for catalytic precursor dissociation is eliminated through the use of plasma enhancement. However, in this regime the incubation time for the activation of VLS growth must be minimized to avoid burying the … Show more

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Cited by 124 publications
(137 citation statements)
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“…The authors observed that the efficiency enhancement, due to the presence of the NWs, increased light trapping within the device, and the fabricated cells showed a maximum efficiency of 0.9%, with VR oc R =300mV, and JR sc R =11mA/cmP The best FF of our Au-catalyzed SiNW solar cells was 59%, which was about twice that of the best Zn-catalyzed SiNW solar cell. This value of the FF was significantly higher than that reported for other SiNW solar cell devices with FFs of 20% and 40% [32,20]. The sSeries resistance (RR s R) isare the another parameter that can affect cell performance.…”
Section: J-v Characteristicsmentioning
confidence: 63%
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“…The authors observed that the efficiency enhancement, due to the presence of the NWs, increased light trapping within the device, and the fabricated cells showed a maximum efficiency of 0.9%, with VR oc R =300mV, and JR sc R =11mA/cmP The best FF of our Au-catalyzed SiNW solar cells was 59%, which was about twice that of the best Zn-catalyzed SiNW solar cell. This value of the FF was significantly higher than that reported for other SiNW solar cell devices with FFs of 20% and 40% [32,20]. The sSeries resistance (RR s R) isare the another parameter that can affect cell performance.…”
Section: J-v Characteristicsmentioning
confidence: 63%
“…Also, other authors have used Sn and Al catalysts to grow SiNWs by PPECVD and PECVD methods [16,20]. They found that these grown SiNWs exhibited amorphous structure.…”
Section: Crystalline Structurementioning
confidence: 99%
“…Using the PECVD to prepare an amorphous layer over the wire, which led to a reduction in the crystallinity of the as-grown SiNWs [30][31][32]. Another reason for the weak crystallinity is that the wires were grown with a polycrystalline structure and the strength of the diffraction peaks in the XRD pattern is dependent on the particle size and the larger particles dominate [33].…”
Section: Crystalline Structurementioning
confidence: 99%
“…Plasma-Enhanced Chemical Vapor Deposition (PECVD) is another deposition method that has been used to produce SiNWs [19]. In PECVD, the plasma is used to promote the decomposition of precursor sources into reactive species [20]. The objective of the present work is to synthesize SiNWs via pulsed PECVD using Zn as a catalyst and to study the effects of varying catalyst thickness on the morphology and structural properties of SiNWs.…”
Section: Introductionmentioning
confidence: 99%
“…Parlevliet and Jennings have shown previously that SiNWs synthesized by PPECVD with a Sn catalyst are entirely amorphous [23]. Moreover, SiNWs grown by PECVD using Al as a catalyst on Si at 600 °C were also amorphous in structure [30]. Yu et al studied the growth temperature effect on the structure and properties of the SiNWs produced by Sn-catalyzed PECVD [31].…”
Section: X-ray Diffractionmentioning
confidence: 99%