Plasma-etched neural probes

Kewley, David T.; Hills, Matthew D.; Borkholder, David A.; Opris, I.E.; Maluf, N.I.; Storment, C.W.; Bower, James M.; Kovacs, G.T.A.

doi:10.1016/s0924-4247(97)80221-x

Cited by 100 publications

(56 citation statements)

References 14 publications

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“…The pioneering work by Wise et al [18] has been followed by numerous studies that exploited integrated-circuit technology to build neurological microelectrodes. These devices typically consist of metallic electrodes, such as iridium [17], gold [19,20], and platinum [21], which are photolithographically patterned on passivated silicon substrates (Figure 1.3-6). The interconnects are passivated by a dielectric layer.…”

Section: Mems Neural Probesmentioning

confidence: 99%

Towards MEMS Probes for Intracellular Recording

et al. 2002

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Simultaneous, multi-site recording from the brain of freely behaving animals will allow neuroscientists to correlate neuronal activity with external stimulation and behavior. This information is critical for understanding the complex interactions of brain cells. Recent interest in microelectromechanical systems (MEMS) and in particular in bio-MEMS research has led to miniaturization of microelectrodes for extracellular neuronal recording. MEMS technology offers a unique opportunity to build compact, integrated sensors well suited for multi-site recording from freely behaving animals. These devices have the combined capabilities of silicon-integrated circuit processing and thin-film microelectrode sensing. MEMS probes for intracellular recording may offer significantly improved signal quality. Here we discuss the basic concepts that underlie the construction of intracellular MEMS probes. We first review the basics of neuronal signaling and recording, and the principles of microelectrode technology and techniques. Progress in MEMS technology for neuronal recording is then discussed. Finally, we describe MEMS probes for intracellular recording, viz., fabrication of micro-machined silicon needles capable of penetrating cell membranes. Using these needles, we recorded localized extracellular signals from the hawk moth Manduca sexta and obtained first recordings with silicon-based micro-probes from the inside of neurons, using an isolated brain of the sea slug Tritonia diomedea.

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Section: Mems Neural Probesmentioning

confidence: 99%

Towards MEMS Probes for Intracellular Recording

et al. 2002

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“…For example, neuroprosthetic applications will have di!erent requirements than detailed connectivity experiments. Our current series of implants, with the relatively simple microwire electrode array provide a reference mark by which the recording performance of other types of implantable electrode systems can be evaluated [4,5,7].…”

Section: Discussionmentioning

confidence: 99%

Stability of chronic multichannel neural recordings: Implications for a long-term neural interface

1999

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Chronic multichannel neural recording has emerged as a powerful technique for studying dynamic brain function. In many experimental paradigms, it is important that the same neurons be recorded from day to day. The objective of this study was to develop methods for tracking the recorded neural population over time through analysis of unit waveforms, principle component clusters and response properties of single units and multiunit clusters. We demonstrate that these techniques can be used to provide a useful measure of unit stability over extended recording periods.

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“…A new silicon-on-insulator (SOI)-based MEAs was developed in Caltech and Stanford using a plasma and wet etching process to define the probe outline and make sharp tips [99]. The method was improved using only deep reactive ion etching (DRIE) process on SOI substrate with SiO2 layer acting as an etch stop.…”

Section: Silicon On Insulator (Soi) Probesmentioning

confidence: 99%