SynopsisPlasma polymerization of tetrafluoroethylene by itself and mixed with inert gases has been studied in the field free zone inside a Faraday cage. The chemical structure was analyzed by ESCA, revealing both linear and branched products. Linear products are formed by less energetic plasmas and at low monomer residence times. Lower energy plasmas result from the use of lower powers and lower percentages of helium in the feed. Production of linear products under these conditions is probably due to lower rates of free radical and metastable formation in the plasma. Through a combination of kinetic and mass transfer effects, shorter monomer residence times under high flow rates and within short distances from the front edge of the electrode give rise to a lower concentration of free radicals a t the electrode surface, producing a more linear polymer. Linear products were also formed at very high powers. This latter result is quite unexpected and is probably due to rapid gas phase polymerization. The chemical structure was not affected significantly by the substrate temperature or by hydrodynamics in this work. All of the evidence indicates that the gases were well mixed in the reaction zone for the range of process variables and for the gases studied. The deposition rate was also studied as a function of the reaction conditions. It was affected by the concentration of free radicals, the concentration of the monomer, and the substrate temperature. The observed deposition rate profile across the electrode is consistent with mass transfer and kinetic considerations governing free radical and monomer concentrations on the electrode surface. The deposition rate is greater a t the lower substrate temperature used, probably due to enhanced adsorption process.