Plasma production with rotating ion cyclotron waves excited by Nagoya Type-III antennas in RFC-XX

Okamura, S.; Adati, K.; Aoki, Takashi; Baker, D. R.; Fujita, Hideki; Garner, Harold R.; Hattori, Katsumi; Hidekuma, S.; Kawamoto, T.; Kumazawa, R.; Okubo, Y.; Sato, Teruyuki

doi:10.1088/0029-5515/26/11/004

Cited by 30 publications

(17 citation statements)

References 11 publications

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“…17 A number of researchers have measured the spatial dependence of the wave magnetic fields in helicon sources. 7,8,[12][13][14] For the type of antenna used in these experiments, a Nagoya type III, 18 typical wave magnetic field measurements are consistent with theoretical predictions for a plasma dominated by the lowest azimuthal mode (mϭϩ1) and lowest radial mode. 12,13 Su-perposition of multiple azimuthal and radial modes has also been observed in helicon experiments.…”

Section: Introductionsupporting

confidence: 80%

Frequency dependent effects in helicon plasmas

1997

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Variations in the plasma parameters of a large volume, helicon source as a function of applied rf power ͑0-2 kW͒, driving frequency ͑8-18 MHz͒, magnetic field ͑0-1.4 kG͒ and fill pressure ͑2-10 mTorr͒ have been studied. The transitions between the capacitive, inductive, and resonant helicon mode are consistent with previous experiments. Our data indicate that the transition to the helicon mode occurs at a unique magnetic field, independent of the driving frequency. Based on the helicon wave dispersion relation, from which helicon wavelengths can be calculated, the observed variations in plasma density as a function of driving frequency suggest that the wavelength of the helicon wave is a weak function of driving frequency. Calculation of the electron energies which correspond to the phase velocity of the driving wave ͑i.e., Landau damping͒ suggest that either Landau damping cannot be responsible for the efficient ionization of helicon sources, or that the helicon portion of the discharge does not extend over the entire radius of the apparatus.

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Section: Introductionsupporting

confidence: 80%

Frequency dependent effects in helicon plasmas

1997

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“…Until recently, the double-saddle coil antenna was used almost exclusively by Boswell and coworkers [4]- [8], etc. The plane-polarized Nagoya Type III antenna [85], [88] was adopted by Chen and co-workers [10]- [17], etc. Twisted Nagoya Type III antennas (helical antennas) of either RH or LH polarization were first used by Shoji [56]- [58] and later adopted by Chen et al These antennas all have azimuthal symmetry, and the current return is via circular end-rings.…”

Section: Antenna Couplingmentioning

confidence: 99%

Helicons-the past decade

Chen¹,

Boswell

1997

IEEE Trans. Plasma Sci.

306

178

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First observed in gaseous plasmas in the early 1960's, helicon discharges lay like a sleeping giant until they emerged in the 1980's, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized. Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency discharges. Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one. The most recent results indicate that a nonobvious resolution of these problems is at hand.

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“…The most common antenna used to excite helicon waves is the Nagoya Type III antenna [1], a modification of which is the double-saddle coil of Boswell [2]. Helical antennae were first used by Shoji [3] and have been adopted by other workers [4].…”

Section: Introductionmentioning

confidence: 99%