2021
DOI: 10.1016/j.apsusc.2020.148876
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Plasma treatment as a versatile tool for tuning of sorption properties of thin nanoporous carbon films

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Cited by 16 publications
(10 citation statements)
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“…The increase of the resistance of the sample during ammonia adsorption was reported earlier for nanoporous a-C:H films [6,7], and could be explained by a hole-depletion process [19,20]. Adsorbed ammonia molecule donates an electron to the p-type film inducing a decrease of charge carriers.…”
Section: Gas Sensing Properties Of Annealed Filmssupporting
confidence: 65%
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“…The increase of the resistance of the sample during ammonia adsorption was reported earlier for nanoporous a-C:H films [6,7], and could be explained by a hole-depletion process [19,20]. Adsorbed ammonia molecule donates an electron to the p-type film inducing a decrease of charge carriers.…”
Section: Gas Sensing Properties Of Annealed Filmssupporting
confidence: 65%
“…On the contrary, the growth of a low-density porous carbon network needs low kinetic energy of the deposited particles, which is not easy to implement in a highly non-equilibrium plasma deposition process. Recently, a novel approach for plasma deposition of low-density nanoporous amorphous carbon films from methane and acetylene gas precursors was suggested [6,7]. The method uses a radio frequency planar magnetron system in chemical vapor deposition mode and therefore was called 'magnetron plasma enhanced chemical vapor deposition' (MPECVD).…”
Section: Introductionmentioning
confidence: 99%
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“…In general, the following phrases are used in scientific works: "Plasma modification" or "Plasma treatment" -which can represent many, e. g.: plasma modification, plasma treatment or targeted plasma modificatio [6][7][8][9][10][11]. The potential for such targeted modification can be expressed in: activation and deactivation; sterilization (food); cleaning; tuning and enhancement; induction (e. g., electrostatic fibre crosslinking); possibly inducing an effect (physical mechanisms and interactions); change in absorbency, hydrophobicity / hydrophilicity.…”
Section: Introductionmentioning
confidence: 99%
“…It is a dry and clean method. [8][9][10] The common plasma methods used for fiber interface treatment include plasma etching, plasma activation, functionalization, plasma induced grafting, and plasma polymerization for polymer surface modification. [11][12][13] All kinds of gases can be used to produce plasma.…”
Section: Introductionmentioning
confidence: 99%