Plasmas generated by electron beam passing through diamond window

Zhu, Bangle; Ma, Yinguang; Yan, Sun; Ke, Wei; Yang, Kuan; Zhu, Xiaodong

doi:10.1063/5.0022208

Cited by 4 publications

(7 citation statements)

References 19 publications

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“…The continuous electrons emitted from the LaB 6 cathode were focused and accelerated by high voltage, and then entered the working chamber through the diamond film window, which has been described in our previous work [9]. The diameter of the electron beam was about 1 mm.…”

Section: Experimental Settingsmentioning

confidence: 99%

“…Titanium, aluminum and other metal films are widely used as transmission windows for high energy electron beam [2,7]. For lower energy electron beam, it was reported that functional films including ceramic film and diamond film are employed in electron beam plasma sources [8,9].…”

Section: Introductionmentioning

confidence: 99%

“…Recently, Morozov et al have investigated the spatial distribution of fluorescent intensity in electron beam plasma with the ceramic window [12]. In our previous work, diamond thin film window has been used for electron beam plasma generation by using diamond excellent properties [9]. The transmission process of the electron beam in the diamond film and the damage of the diamond structure caused by the electron beam bombardment were investigated by experiments and numeric simulations.…”

Section: Introductionmentioning

confidence: 99%

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Investigation on property of electron beam plasma with diamond window

Zhu¹,

Yan²,

Chen³

et al. 2022

Plasma Sources Sci. Technol.

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The properties of Ar plasma generated by electron beam with initial energy of 45 keV passing through a 5-μm-thick diamond film window was investigated by experimental diagnostic and Monte Carlo simulation. It is found that the plasma light emission intensity enhances with increasing the electron beam current, while the plasma shape has no significant change. When the gas pressure increases, the plasma shrinks and becomes brighter, and its shape gradually changes from cone-shape to semi prolate spheroid. The electron density increases with increasing gas pressure and electron current. When the gas pressure is higher than 10 kPa, the electron density can reach the order of 1010 cm-3 at an electron current of 0.3 mA. Under high-pressure conditions, the plasma range with respect to gas pressure satisfies well a simple inverse relationship. The electron energy deposition distribution obtained by Monte Carlo simulation is consistent with the measured plasma light emission intensity distribution. Optical emission spectroscopy was used to analyze collision process in the electron beam plasma. The line intensities of the 2p2, 2p6 and 2p10 levels grow relatively with increasing gas pressure, indicating that the atom-atom collisional processes are enhanced.

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Section: Experimental Settingsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Investigation on property of electron beam plasma with diamond window

Zhu¹,

Yan²,

Chen³

et al. 2022

Plasma Sources Sci. Technol.

Self Cite

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“…We also demonstrate that the dust flow can become turbulent, especially at low e-beam currents. The second application is concerned with the full rotation of a PC which keeps its symmetry, irradiated sideways by the e-beam.Plasmas generated by e-beam irradiation are of interest in several areas of applied and fundamental physics spanning from industrial processes such as semiconductor etching used in the fabrication of silicon wafers [32][33][34][35][36] to laboratory and space plasmas [37][38][39][40] . The e-beam is an important tool for the manipulation of dust particles in plasma which can induce dynamics with some unique properties such as sheared, laminar and turbulent dust flows 20 .…”

mentioning

confidence: 99%

“…Plasmas generated by e-beam irradiation are of interest in several areas of applied and fundamental physics spanning from industrial processes such as semiconductor etching used in the fabrication of silicon wafers [32][33][34][35][36] to laboratory and space plasmas [37][38][39][40] . The e-beam is an important tool for the manipulation of dust particles in plasma which can induce dynamics with some unique properties such as sheared, laminar and turbulent dust flows 20 .…”

mentioning

confidence: 99%

A laboratory platform for studying rotational dust flows in a plasma crystal irradiated by a 10 keV electron beam

Ticoş

Constantin

Mitu

et al. 2023

Sci Rep

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A novel laboratory platform has been designed and built for the irradiation of a plasma crystal (PC) with an electron beam (e-beam) having an energy around 10 keV and a current of tens of milliamperes. The pulsed e-beam collimated to a few millimeter-size spot is aimed at a crystal made of dust particles levitated in a radio-frequency (RF) plasma. The platform consists of three vacuum chambers connected in-line, each with different utility: one for generating free electrons in a pulsed hollow-anode Penning discharge, another for the extraction and acceleration of electrons at $$\sim 10$$ ∼ 10 kV and for focusing the e-beam in the magnetic field of a pair of circular coils, and the last one for producing PCs above a RF-driven electrode. The main challenge is to obtain both a stable e-beam and PC by insuring appropriate gas pressures, given that the e-beam is formed in high vacuum ($$\lesssim 10^{-4}$$ ≲ 10 - 4 Torr), while the PC is produced at much higher pressures ($$\gtrsim 10^{-1}$$ ≳ 10 - 1 Torr). The main diagnostics include a high speed camera, a Faraday cup and a Langmuir probe. Two applications concerned with the creation of a pair of dust flow vortices and the rotation of a PC by the drag force of the e-beam acting on the strongly coupled dust particles are presented. The dust flow can become turbulent as demonstrated by the energy spectrum, featuring vortices at different space scales.

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Optical properties of N2/Ar plasma generated by electron beams with silicon nitride transmission window at high pressures

Yan

Chen

et al. 2023

Physics of Plasmas

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In this paper, we report the generation of nitrogen/argon electron beam plasmas with a 0.4 μm-thick silicon nitride transmission window. The measured transmittance of the electron beam is about 92% when the incident energy of electron beam is 40 keV. The optical properties of the electron beam plasma are investigated at high pressures. The luminescence intensity distribution of nitrogen and argon electron beam plasmas shows a good similarity with changing the gas pressure, suggesting that electron beam ionization is independent of background gas. At the same gas pressure, the nitrogen plasma with conical structure has a longer length along the incident direction of the electron beam and a smaller divergence cone angle compared with the argon plasma. In the nitrogen discharge, it is found that the intensities I380.4, I399.7, and I391.4 corresponding to characteristic lines at 380.4, 399.7, and 391.4 nm decrease along the incident direction of the electron beam, which is correlated with the reduction of the electron density along the incident direction of the electron beam. There is no change in the ratio of I399.7 to I380.4, indicating the spatial uniformity of the electron temperature. When the pressure increases, the ionization process induced by primary electron is enhanced, generating more plasma electrons, which is responding to the increase in the characteristic line intensity. At the same time, the neutral particle collision processes are enhanced and the electron temperature decreases with the increase in the pressure, which is believed to contribute to the observed reduction of the I399.7/I380.4 ratio.

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Plasmas generated by electron beam passing through diamond window

Cited by 4 publications

References 19 publications

Investigation on property of electron beam plasma with diamond window

Investigation on property of electron beam plasma with diamond window

A laboratory platform for studying rotational dust flows in a plasma crystal irradiated by a 10 keV electron beam

Optical properties of N2/Ar plasma generated by electron beams with silicon nitride transmission window at high pressures

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