Plasmaunterstützte Abscheidung von BCN-Schichten

Thamm, Thomas; Körner, K.-U.; Dietrich, D.; Marx, G.

doi:10.1002/1521-3749(200209)628:9/10<2232::aid-zaac2232>3.0.co;2-a

Z. anorg. allg. Chem.

2002

DOI: 10.1002/1521-3749(200209)628:9/10<2232::aid-zaac2232>3.0.co;2-a

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Plasmaunterstützte Abscheidung von BCN-Schichten

Thomas Thamm

K.-U. Körner

D. Dietrich

et al.

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Plasmaunterstützte Abscheidung von BCN-Schichten

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