Platinum Resistance Thermometry

Resistance temperature detectors are commonly used measurement sensors in heat transfer studies. In many resistance temperature detectors, the platinum resistance thermometer (PRT) is chemically stable, has a wide temperature measurement range and possesses high measurement accuracy. In phase change studies of carbon nanotubes, bi-porous structures for microelectronic thermal management, 100 nm thick PRTs are developed on silicon substrates with 10 nm titanium adhesive to achieve precise and interface-free temperature measurements. After an annealing at 375 • C, the PRT samples are calibrated at a temperature range from 20 to 180 • C. Measurement hysteresis of temperature appears in thermal cycles. Electrical resistance tends to become low during all heating periods, which establishes the maximum measurement deviation of 10 • C. Experimental results from two different thin-film PRTs indicate that accurate and repeatable temperature measurements can be achieved by either reducing heating speed or using data in the cooling period.

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Platinum Resistance Thermometry

Cited by 2 publications

References 24 publications

Zinc-Filled Multi-entrance Fixed Point

Zinc-Filled Multi-entrance Fixed Point

Development of a platinum resistance thermometer on the silicon substrate for phase change studies

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